Semiconductor device and mask pattern
View Patent ↗A semiconductor device according to an aspect of the invention includes a semiconductor substrate, and a capacitor that is provided above the semiconductor substrate and is configured such that a dielectric film is sandwiched between a lower electrode and an upper electrode, the dielectric film being formed of an ABO 3 perovskite-type oxide that includes at least one of Pb, Ba and Sr as an A-site element and at least one of Zr, Ti, Ta, Nb, Mg, W, Fe and Co as a B-site element, wherein a radius of curvature of a sidewall of the capacitor, when viewed from above or in a film thickness direction, is 250 [nm] or less, and a length of an arc with the radius of curvature is {250 [nm]×π/6 [rad]} or less.
1. A semiconductor device comprising:
a semiconductor substrate; and
a capacitor that is provided above the semiconductor substrate and is configured such that a dielectric film is sandwiched between a lower electrode and an upper electrode, the dielectric film being formed of an ABO 3 perovskite-type oxide that includes at least one of Pb, Ba and Sr as an A-site element and at least one of Zr, Ti, Ta, Nb, Mg, W, Fe and Co as a B-site element,
wherein the capacitor comprises at least one sidewall, the at least one sidewall having a radius of curvature being 250 nm or less and an arc length being 250 nm or less, wherein an angle subtended by the arc length is π/6 rad, with the proviso that the radius of curvature and the arc length are not zero,
wherein a taper angle of the at least one sidewall, relative to the semiconductor substrate, is 85° or less.
2. The semiconductor device according to claim 1 , wherein the at least one sidewall is the entirety of side surfaces of the capacitor.