Arrangement for building a miniaturized fourier transform interferometer for optical radiation according to the michelson principle or a principle derived therefrom
An arrangement for building a compact Fourier transform interferometer for optical radiation according to the Michelson principle or a principle derived therefrom. According to the invention, this arrangement is characterized in that the optical modulation of the radiation in at least one of the interferometer arms is produced by the translational displacement of micromechanical translation mirrors that are optically accessible on one side or on both sides, with an effective oscillation amplitude of at least 50 μm and a usable mirror surface area of at least 1 mm 2 . In doing so, the micromechanical mirror components according to the invention assume the function of known movable mirrors so that by using an almost massless microcomponent in comparison to conventional systems, a much smaller size and a mirror modulation frequency that is several orders of magnitude higher can be achieved. The arrangement according to the invention is used especially for optical spectroscopy.
1. An arrangement for a compact Fourier transform interferometer for optical radiation according to one of the Michelson principle and a principle derived therefrom, comprising:
a micromechanical translation mirror having two sides, an effective oscillation amplitude of at least 50 μm, and a usable mirror surface area of at least 1 mm 2 ,
the micromechanical translation mirror being optically accessible on one side, and
the micromechanical translation mirror being translationally displaceable; and
two interferometer arms, wherein,
optical modulation of radiation in at least one of the interferometer arms is produced by translational displacement of the micromechanical translation mirror.
2. Arrangement according to claim 1 , further comprising:
a beam splitter; and
a locally fixed mirror, wherein the one micromechanical translation mirror is arranged in an acute beam guidance between the beam splitter and the locally fixed mirror to provide a twofold use of the oscillation amplitude of the micromechanical translation mirror.
3. An arrangement according to claim 1 , wherein,
the micromechanical translation mirror is optically accessible on both of the two sides, and
simultaneous optical modulation of the radiation in the two interferometer arms is produced by the micromechanical translation mirror.
4. An arrangement according to claim 1 , further comprising:
another micromechanical translation mirror,
the micromechanical translation mirror being separate from the another micromechanical translation mirror,
wherein,
the micromechanical translation mirror and the another micromechanical translation mirror oscillate synchronously with a constant phase shift of 180°, and
the micromechanical translation mirror and the another micromechanical translation mirror provide simultaneous modulation of the radiation in the two interferometer arms.
5. An arrangement according to claim 1 , further comprising:
an evaluation unit;
a beam path;
a reference laser interferometer with a frequency-stabilized and temperature-stabilized laser diode, a beam splitter, and a photodiode ( 24 ) that measures modulated laser radiation, wherein
the micromechanical translation mirror is optically accessible on both of the two sides,
the micromechanical translation mirror is movable in the beam path
the modulated laser radiation measured on the photodiode is transmitted, as a time-dependent position determination signal of the micromechanical translation mirror, to the evaluation unit.
6. The arrangement according to claim 5 , wherein the laser diode is frequency and temperature-stabilized for the visible spectral range.
7. An arrangement according to claim 1 , further comprising:
an evaluation unit;
a mirror control for controlling the micromechanical translation mirror;
a sensor, integrated into the micromechanical translation mirror, said sensor configured to detect one of the position and the phase relation of the micromechanical translation mirror at least twice per oscillation period, wherein,
sensor data is transmitted to at least one of the mirror control and the evaluation unit to provide a signal for time-dependent position determination of the micromechanical translation mirror.
8. The arrangement according to claim 7 , wherein said sensor is a capacitive through-way sensor.
9. An arrangement according to claim 1 , further comprising:
a mirror control for controlling the micromechanical translation mirror, wherein
said micromechanical translation mirror is configured to oscillate at a frequency specified by the mirror control,
said frequency within a range from 0.2 kHz to 20 kHz.
10. The arrangement according to claim 9 , wherein the frequency is near 1 kHz, close to a component-dependent resonance frequency of the micromechanical translation mirror.
11. An arrangement according to claim 1 , further comprising:
a mirror control for controlling the micromechanical translation mirror; wherein
the micromechanical translation mirror is configured to resonantly oscillate.
12. The arrangement according to claim 11 , further comprising:
a position sensor, integrated with the micromechanical translation mirror, to provide data of an oscillation state of the micromechanical translation mirror linked to a characteristic oscillation behavior of the micromechanical translation mirror.
13. An arrangement according to claim 1 , further comprising:
a detector with time behavior matched to a frequency of the oscillation of said micromechanical translation mirror, to provide detection of radiation modulated by said translational displacement of said micromechanical translation mirror as an electronic signals.
14. An arrangement according to claim 13 , further comprising:
a control of the micromechanical translation mirror;
a recording apparatus to record signals detected by the detection unit;
at least one electronic device configured to process the electronic signals from the detector and a position of said micromechanical translation mirror into a spectrum ; and
at least one interface, configured to connect said electronic devices to a subsequent system.
15. The arrangement according to claim 14 , wherein said at least one electronic device is based on at least one digital signal processor.
16. The arrangement according to claim 14 , wherein said at least one interface is compliant with the USB standard.
17. The arrangement according to claim 13 , wherein said radiation detector is one of a cooled HgCdTe detector for mid-infrared radiation and an InGaAs detector for near-infrared radiation.
18. The arrangement according to claim 1 , further comprising:
a silicon spring; and
a comb electrode coplanar to said silicon spring,
said micromechanical translation mirror being suspended on said silicon spring, and
said silicon spring configured to oscillate electrostatically in a direction normal to the plane of said mirror surface upon operative excitation of said comb electrode.