Semiconductor substrate and thin processing method for semiconductor substrate
View Patent ↗A semiconductor substrate having a first substrate surface which includes a device area in which semiconductor devices are formed and a substrate peripheral portion which does not overlap with the device area. A concavo-convex portion is formed in the substrate peripheral portion. Preferably, a concavo-convex portion is formed in a side portion which adjoins the peripheral portion. The concavo-convex portion formed in the substrate peripheral portion or the side portion may be formed by a method such as dry etching, wet etching, mechanical grinding, electrolytic plating, nonelectrolytic plating, or patterning using one of a resin material and a metal material. A thin processing method includes forming the device area; forming the concavo-convex portion in the substrate peripheral portion; adhering the first substrate surface to a support; and grinding a second substrate surface of the semiconductor substrate, which is opposite with the first substrate surface.
1. A method for thin processing a semiconductor substrate, comprising:
forming a device area on a first substrate surface of the semiconductor substrate, wherein semiconductor devices are formed in the device area;
forming a concavo-convex portion in a substrate peripheral portion which does not overlap with the device area in the first substrate surface;
adhering the first substrate surface to a support; and
grinding a second substrate surface of the semiconductor substrate, which is opposite with the first substrate surface.
2. A method as claimed in claim 1 , wherein the adhering of the first substrate surface includes adhering the first substrate surface via an adhesive layer.
3. A method as claimed in claim 2 , wherein the adhesive layer is in a fluid state.
4. A method as claimed in claim 1 , wherein the grinding of the second substrate surface is performed by back grinding.
5. A method as claimed in claim 1 , further comprising:
reducing a diameter of the semiconductor substrate by grinding a side portion of the semiconductor substrate device area, so that the diameter of the semiconductor substrate is less than a diameter of the support.