Semiconductor device and method for manufacturing same
View Patent ↗A semiconductor device is provided which has a capacitor insulating film made up of zirconium aliminate being an amorphous film obtained by having crystalline dielectric contain amorphous aluminum oxide and having its composition of Al X Zr (1-X) O Y (0.05≦x≦0.3), hereby being capable of preventing, in a process of forming a capacitor of MIM (Metal Insulator Metal) structure, dielectric breakdown of a capacitor insulating film while a relative dielectric constant of a metal oxide film used as the capacitor insulating film is kept high.
1. A semiconductor device comprising:
a capacitor of a MIM (Metal Insulator Metal) structure comprising a lower electrode and an upper electrode each made up of a metal film, and a capacitor insulating film sandwiched between said lower electrode and said upper electrode;
wherein said capacitor insulating film comprises an amorphous film comprising amorphous aluminum oxide and a crystalline dielectric and having a composition of Al x M (1-X) O y (where Al denotes an aluminum atom, M denotes a metal atom other than aluminum atom, the metal atom being able to form the crystalline dielectric, and O denotes an oxygen atom).
2. The semiconductor device according to claim 1 , wherein said crystalline dielectric contains at least any one selected from a group of zirconium, hafnium, or a lanthanoid group element.
3. The semiconductor device according to claim 1 , wherein said capacitor insulating film comprises said amorphous film being kept in an amorphous state, even if thermal treatment is performed after formation of said capacitor.
4. The semiconductor device according to claim 1 , wherein said capacitor insulating film has a multilayer structure comprising at least one layer of said crystalline dielectric and at least one layer of said amorphous aluminum oxide.
5. The semiconductor device according to claim 1 , wherein a film thickness for every one layer of said crystalline dielectric is about 4 nm or less.