Process for deposition of semiconductor films
View Patent ↗Chemical vapor deposition processes utilize higher order silanes and germanium precursors as chemical precursors. The processes have high deposition rates yet produce more uniform films, both compositionally and in thickness, than films prepared using conventional chemical precursors. In preferred embodiments, trisilane is employed to deposit SiGe-containing films that are useful in the semiconductor industry in various applications such as transistor gate electrodes.
1. A process for depositing a SiGe-containing material onto a surface, comprising:
providing a chemical vapor deposition chamber having disposed therein a substrate:
introducing a gas comprised of a higher-order silane of the formula Si n H 2n+2 and a germanium precursor to the chamber, wherein n=3–6; and
depositing a SiGe-containing film onto the substrate at a deposition temperature greater than 525° C.
2. The process as claimed in claim 1 , wherein the higher-order silane is selected from the group consisting of trisilane and tetrasilane.
3. The process as claimed in claim 1 , wherein the germanium precursor is selected from the group consisting of germane, digermane, trigermane and tetragermane.
4. The process as claimed in claim 1 , wherein the higher-order silane is trisilane and the germanium precursor is germane.
5. The process as claimed in claim 1 , wherein the SiGe-containing film is at least partially crystalline.
6. The process as claimed in claim 1 , wherein the SiGe-containing film is epitaxial.
7. The process as claimed in claim 6 , wherein the SiGe-containing film is a strained heteroepitaxial SiGe film.
8. The process as claimed in claim 6 , wherein the deposition temperature is in the range of about 620° C. to about 800° C.
9. The process as claimed in claim 1 , wherein the SiGe-containing film is amorphous.
10. The process as claimed in claim 1 , wherein the SiGe-containing film is polycrystalline.
11. The process as claimed in claim 1 , wherein the depositing is carried out at a rate of about 100 Å per minute or higher.
12. The process as claimed in claim 1 , wherein the SiGe-containing film is carbon-doped.
13. The process as claimed in claim 1 , wherein the gas further comprises a carbon source.
14. The process as claimed in claim 1 , wherein the SiGe-containing film comprises a dopant selected from the group consisting of boron, phosphorous, antimony, indium, and arsenic.
15. The process as claimed in claim 1 , wherein the gas further comprises a dopant precursor.
16. The process as claimed in claim 1 , wherein the chemical vapor deposition chamber is a single-wafer, horizontal gas flow reactor.
17. The process as claimed in claim 1 , wherein the SiGe-containing film has a thickness non-uniformity of about 10% or less.
18. The process as claimed in claim 1 , wherein the SiGe-containing film has greater uniformity than a comparable film made using silane in place of the higher-order silane.
19. The process as claimed in claim 1 , further comprising patterning the SiGe-containing film to form a transistor gate electrode.
20. The process as claimed in claim 1 , wherein the substrate comprises a dielectric film.
21. The process as claimed in claim 20 , wherein the dielectric film is a silicon oxide film.
22. The process as claimed in claim 20 , wherein the dielectric film has a dielectric constant greater than 5.