Microsensor with ferroelectric material and method for fabricating the same
View Patent ↗A microsensor fabricated with a ferroelectric material and a fabrication method therefor are provided. The microsensor includes a support, an insulating layer on the support, a first electrode on the insulating layer, a ferroelectric layer having at least a metal on the insulating layer and the first electrode, and at least a second electrode on the ferroelectric layer.
1. A method for fabricating a microsensor, comprising steps of:
(a) providing a substrate;
(b) forming an insulating layer on said substrate;
(c) forming a first electrode on said insulating layer;
(d) forming a ferroelectric layer on said first electrode and said insulating layer;
(e) providing at least a metal in said ferroelectric layer via one of a microwave post-treatment and an excimer laser annealing treatment; and
(f) forming at least a second electrode on said ferroelectric layer.
2. The method according to claim 1 , further comprising a step (g) of:
transforming said substrate into a support.
3. The method according to claim 1 , wherein each of the microwave post-treatment and the excimer laser annealing treatment is a heat treatment.
4. The method according to claim 1 , further comprising a step (f1) of:
forming a passivation layer on said ferroelectric layer.
5. The method according to claim 1 , wherein said substrate comprises a silicon.
6. The method according to claim 1 , wherein said insulating layer comprises one of a silicon oxide and a silicon nitride.
7. The method according to claim 1 , wherein said first electrode and said second electrode comprise one of an electrically conductive ceramic material and a metal with a relatively high melting-point.
8. The method according to claim 7 , wherein said metal with said relatively high melting-point is a platinum.
9. The method according to claim 1 , wherein said ferroelectric layer is a polycrystalline barium strontium titanate (BST) layer.
10. The method according to claim 1 , wherein said metal comprises one of a chromium and a manganese.