Photomask and manufacturing method of the same, and pattern forming method
Data (pattern data) ( 21 ) of a mask data ( 2 ) to form a mask pattern is made into an octagon. An electron-beam lithography system has a high resolution, and it requires a polygonal pattern data having many more vertexes such as an octagon. With the use of such a pattern data, a photomask ( 3 ) having a mask pattern ( 22 ) being an aperture closer to a circle (approximated circle) can be obtained. Backed by this, it is possible to form resist patterns at smaller pitches without causing failures in manufacturing a device such as a reduction in resist film thickness, a disconnection between actual patterns such as of contact holes, and so forth. Further, it is possible to eliminate the factor of mask manufacturing process from the optical proximity correction to simplify the optical proximity correction, so that desired macro actual patterns can be formed easily and accurately.
1. A manufacturing method of a photomask including a first mask pattern formed in a first portion and a second mask pattern formed in a second portion, comprising:
a first step creating a first design data of the first mask pattern and a second design data of the second mask pattern; and
a second step forming the first mask pattern and the second mask pattern, based on the first design data and the second design data,
wherein the first step comprises:
creating the first design data in the first portion by using line segments that form a polygon shape on a first outline part of the first mask pattern and
creating the second design data in the second portion, by using line segments that form a square shape and have a fewer number of angles than the line segments that form the polygon shape, on a second outline part of the second mask pattern and
wherein the second step comprises:
forming the first mask pattern where the first outline part is approximated to a curve, in the first portion; and forming the second mask pattern where the second outline part is approximated to a square shape, in the second portion.
2. The manufacturing method of the photomask according to claim 1 ,
wherein an actual pattern formed by the first mask pattern is a circular shape or an oval shape, and
wherein the first mask pattern is formed to approximate to the circular shape or the oval shape so as to correspond to the shape of the actual pattern formed by the first mask pattern.
3. The manufacturing method of the photomask according to claim 1 ,
wherein an actual pattern formed by the first mask pattern has an outline with curved corners, and
wherein the first mask pattern is formed to have an outline with curved corners being approximate to the curved corners of the actual pattern formed by the first mask pattern.
4. A photomask including a first mask pattern formed in a first portion and a second mask pattern formed in a second portion,
wherein the first mask pattern is formed, so that a first design data of the first mask pattern is created by using line segments that form a polygon shape on a first outline part and the line segments that form the polygon shape are approximated to a curve based on the first design data, and
wherein the second mask pattern is formed, so that a second design data of the second mask pattern is created by using line segments that form a square shape, and have fewer number of angles than the line segments that form a polygon shape, on a second outline part and the line segments that form the square shape are formed into the square shape based on the second design data.
5. The photomask according to claim 4 ,
wherein an actual pattern formed by the first mask pattern is a circular shape or an oval shape and,
wherein said first mask pattern is formed to approximate to the circular shape or the oval shape so as to correspond to the shape of the actual pattern formed by the first mask pattern.
6. The photomask according to claim 5 ,
wherein the actual pattern formed by the first mask pattern has an outline with curved corners, and
wherein said first mask pattern has an outline with approximated curved corners so as to correspond to the curved corners of the actual pattern.
7. A formation method of a pattern forming an actual pattern comprising:
forming the actual pattern by espousing and transferring a mask pattern using a photomask including a first mask pattern formed in a first portion and a second mask pattern formed in a second portion, wherein
the photomask comprises:
the first mask pattern formed so that a first design data of the first mask pattern is created by using line segments that form a polygonal shape on a first outline part and first outline part is approximated to the curve based on the first design data; and
the second mask pattern formed so that a second design data of the second mask pattern is created by using line segments that form a square shape, and have a fewer number of angles than the line segments that form the polygonal shape, on the second outline part and the second outline part is formed into the square shape based on the second design data.
8. The formation method of the pattern according to claim 7 ,
wherein the actual pattern is a circular shape or an oval shape, and
wherein the first mask pattern is formed to approximate to the circular shape or the oval shape so as to correspond to the shape of the actual pattern.
9. The formation method of the pattern according to claim 8 ,
wherein the actual pattern has an outline with curved corners, and
wherein the first mask pattern has an outline with curved corners approximated to the curved corners of the actual pattern to correspond to the shape of the actual pattern.