IP Library Granted Patent US 7,345,448
Granted Patent B2
US 7,345,448 · App. 11/129,059 · Granted Mar 18, 2008

Adaptive command filtering for servomechanism control systems

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Quick Facts
Patent No.
US 7,345,448
App. No.
11/129,059
Granted
Mar 18, 2008
Kind
B2
Abstract

Preferred embodiments of the invention implement techniques for modifying the command trajectory, the architecture of a servomechanism control system, or both, to reduce the servo error during and/or after the command trajectory. An iterative refinement procedure generates for use by the servomechanism control system a corrective input, du, which significantly reduces the error between the desired and actual servomechanism control system outputs. In one embodiment, a uniquely identified plant model is employed in the iterative refinement procedure to compute an approximate gradient that improves the performance and reliability of the refinement procedure. In another embodiment, the actual plant response is used in place of the identified model in the iterative refinement procedure. This is accomplished by time-reversing the stored error signal from a training run, before applying it to the plant to generate an update to the corrective input signal du.

Claims (36)

1. A high-speed precision servomechanism control system, comprising:

a closed-loop control servomechanism implemented with feedback control and feedforward compensation to control output states of a physical plant in response to a command input stream applied to the control system; and

a corrective input generator responsive to the command input stream to provide a refined input stream to which the physical plant responds to achieve within an operational tolerance a desired output state corresponding to the command input stream, the corrective input generator implemented with correction input mapping that provides for an arbitrary command input stream a match solution causing the physical plant to achieve the desired output state corresponding to the arbitrary command input stream, the corrective input generator comprising a FIR filter having an output and implemented with filter coefficients computed to provide the match solution, and the corrective input generator implemented with an input delay to the arbitrary command input stream combined with the output of the FIR filter to produce the refined input stream.

2. A high-speed precision servomechanism control system, comprising:

a closed-loop control servomechanism implemented with feedback control and feedforward compensation to control output states of a physical plant in response to a command input stream applied to the control system, the output states representing motion and the physical plant representing a beam steering device and power drive electronics operating as part of a laser beam positioning system; and

a corrective input generator responsive to the command input stream to provide a refined input stream to which the physical plant responds to achieve within an operational tolerance a desired output state corresponding to the command input stream, the corrective input generator implemented with correction input mapping that provides for an arbitrary command input stream a match solution causing the physical plant to achieve the desired output state corresponding to the arbitrary command input stream.

3. The control system of claim 2 , in which the command input stream represents desired laser beam position displacements.

4. The control system of claim 2 , in which a dynamic filter transfer function exhibiting a spike at a particular frequency characterizes the operation of the beam steering device, and in which the correction input mapping implemented in the corrective input generator includes a notch filter having a transfer function that counteracts the spike at the particular frequency.

5. The control system of claim 4 , in which the corrective input generator comprises a FIR filter implemented with filter coefficients computed to provide the match solution including the notch filter.

6. The control system of claim 4 , in which the beam steering device includes a galvanometer.

7. The control system of claim 2 , in which the beam steering device includes a galvanometer.

8. A method of establishing a high-speed precision servomechanism control system that includes a closed-loop control servomechanism implemented with feedback control and feedforward compensation to control output states of a physical plant in response to a command input stream, comprising:

providing a corrective input generator responsive to the command input stream to produce a refined input stream to which the physical plant responds; and

performing an iterative command input refinement procedure to implement correction input mapping that provides for an arbitrary command input stream a match solution causing the physical plant to achieve within an operational tolerance a desired output state corresponding to the arbitrary command input stream, the performing an iterative command input refinement procedure including:

(a) applying a refined input command to the servomechanism control system and measuring its output stream, the refined input command including a nominal command input and an incremental correction factor;

(b) measuring an error stream representing a difference between the nominal command input and the measured output stream;

(c) comparing the error stream to an operational tolerance, and whenever the error stream exceeds the operational tolerance, reversing the error stream in time to form a time-reversed error stream, applying the time-reversed error stream as a command to the servomechanism control system and measuring its output stream, time-reversing the measured output stream to form a time-reversed version of the measured output stream, and determining a next refined input command representing a sum of the incremental correction factor and the product of a dynamically adjusted correction gain and the time-reversed version of the measured output stream; and

(d) repeating the preceding steps (a), (b), and (c) until the error stream is within the operational tolerance.

9. A method of establishing a high-speed precision servomechanism control system that includes a closed-loop control servomechanism implemented with feedback control and feedforward compensation to control output states of a physical plant in response to a command input stream, comprising:

providing a corrective input generator responsive to the command input stream to produce a refined input stream to which the physical plant responds; and

performing an iterative command input refinement procedure to implement correction input mapping that provides for an arbitrary command input stream a match solution causing the physical plant to achieve within an operational tolerance a desired output state corresponding to the arbitrary command input stream, the performing an iterative command input refinement procedure including:

(a) applying a refined input command to the servomechanism control system and measuring its output stream, the refined input command including a nominal command input and an incremental correction factor;

(b) measuring an error stream representing a difference between the nominal command input and the calculated output stream;

(c) comparing the measured error stream to an operational tolerance, and whenever the error stream exceeds the operational tolerance, applying by mathematical simulation the measured error stream as a command to the modeled adjoint of the closed-loop control servomechanism and calculating an output stream, and determining a next refined input command representing a sum of the incremental correction factor and the product of a dynamically adjusted correction gain and the calculated output stream; and

(d) repeating the preceding steps (a), (b), and (c) until the measured error stream is within the operational tolerance.

10. A method of establishing a high-speed precision servomechanism control system that includes a closed-loop control servomechanism implemented with feedback control and feedforward compensation to control output states of a physical plant in response to a command input stream, comprising:

providing a corrective input generator responsive to the command input stream to produce a refined input stream to which the physical plant responds; and

performing an iterative command input refinement procedure to implement correction input mapping that provides for an arbitrary command input stream a match solution causing the physical plant to achieve within an operational tolerance a desired output state corresponding to the arbitrary command input stream, the corrective input generator comprising a FIR filter having an output and implemented with filter coefficients computed to provide the match solution, and the corrective input generator implemented with an input delay to the arbitrary command input stream combined with the output of the FIR filter to produce the refined input stream.

11. A method of establishing a high-speed precision servomechanism control system that includes a closed-loop control servomechanism implemented with feedback control and feedforward compensation to control output states of a physical plant in response to a command input stream, comprising:

providing a corrective input generator responsive to the command input stream to produce a refined input stream to which the physical plant responds, the output states representing motion and the physical plant representing a beam steering device and power drive electronics operating as part of a laser beam positioning system; and

performing an iterative command input refinement procedure to implement correction input mapping that provides for an arbitrary command input stream a match solution causing the physical plant to achieve within an operational tolerance a desired output state corresponding to the arbitrary command input stream.

12. The control system of claim 11 , in which the command input stream represents desired laser beam position displacements.

13. The control system of claim 11 , in which a dynamic filter transfer function exhibiting a spike at a particular frequency characterizes the operation of the beam steering device, and in which the correction input mapping implemented in the corrective input generator includes a notch filter having a transfer function that counteracts the spike at the particular frequency.

14. The control system of claim 13 , in which the corrective input generator comprises a FIR filter implemented with filter coefficients computed to provide the match solution including the notch filter.

15. The method of claim 13 , in which the beam steering device includes a galvanometer.

16. The method of claim 11 , in which the beam steering device includes a galvanometer.

Assignments (7)
RELEASE OF SECURITY INTEREST Recorded Aug 24, 2022
From: BARCLAYS BANK PLC
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 062739/0001 →
RELEASE OF SECURITY INTEREST Recorded Aug 24, 2022
From: BARCLAYS BANK PLC
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 063009/0001 →
SECURITY INTEREST Recorded Aug 19, 2022
From: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 061572/0069 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE U.S. PATENT NO.7,919,646 PREVIOUSLY RECORDED ON REEL 048211 FRAME 0312. ASSIGNOR(S) HEREBY CONFIRMS THE PATENT SECURITY AGREEMENT (ABL). Recorded Jan 14, 2021
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 055668/0687 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE U.S. PATENT NO. 7,919,646 PREVIOUSLY RECORDED ON REEL 048211 FRAME 0227. ASSIGNOR(S) HEREBY CONFIRMS THE PATENT SECURITY AGREEMENT (TERM LOAN). Recorded Jan 14, 2021
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 055006/0492 →
PATENT SECURITY AGREEMENT (ABL) Recorded Feb 1, 2019
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 048211/0312 →
PATENT SECURITY AGREEMENT (TERM LOAN) Recorded Feb 1, 2019
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 048211/0227 →