Semiconductor device and method for producing the same
View Patent ↗A method for producing a semiconductor device includes the steps of forming silicon crystal nuclei on a substrate, depositing first amorphous silicon, depositing second amorphous silicon, and crystallizing the first amorphous silicon and the second amorphous silicon by allowing the crystal nuclei to grow in the solid phase.
1. A method for producing a semiconductor device, comprising the steps in order of:
forming isolated silicon crystal nuclei on a substrate;
depositing first amorphous silicon directly on the isolated silicon crystal nuclei;
depositing second amorphous silicon directly on the first amorphous silicon; and
crystallizing the first amorphous silicon and the second amorphous silicon by growing the crystal nuclei in the solid phase.
2. The method for producing a semiconductor device according to claim 1 , wherein the solid-phase growth rate of crystals in the second amorphous silicon is adjusted to a higher rate than that of crystals in the first amorphous silicon.
3. The method for producing a semiconductor device according to claim 1 , wherein the impurity concentration of the second amorphous silicon is adjusted to a higher concentration than that of the first amorphous silicon.
4. The method for producing a semiconductor device according to claim 3 , wherein
the first amorphous silicon has an impurity concentration of 1×10 19 to 1×10 20 atoms/cm 3 ; and
the second amorphous silicon has an impurity concentration of 2×10 20 to 6×10 20 atoms/cm 3 .
5. The method for producing a semiconductor device according to claim 1 , wherein the step of forming the silicon crystal nuclei, the step of depositing the first amorphous silicon, and the step of depositing the second amorphous silicon are continuously performed in the same reaction chamber by low-pressure chemical vapor deposition (LP-CVD).
6. The method for producing a semiconductor device according to claim 5 , wherein the step of forming the silicon crystal nuclei is performed by LP-CVD at 520° C. to 540° C. and 25 Pa or less in a gas system mainly containing silane gas or disilane gas.
7. The method for producing a semiconductor device according to claim 5 , wherein the step of depositing the first amorphous silicon and the step of depositing the second amorphous silicon are performed by LP-CVD at 520° C. to 540° C. and 90 Pa or more in a gas system mainly containing silane gas or disilane gas.
8. The method for producing a semiconductor device according to claim 1 , wherein the first amorphous silicon has a thickness of 3 to 30 nm.
9. The method for producing a semiconductor device according to claim 1 , wherein the step of crystallizing the first amorphous silicon and the second amorphous silicon is performed by heat treatment at 600° C. to 850° C.
10. The method for producing a semiconductor device according to claim 9 , wherein the heat treatment is performed in a nitrogen atmosphere.
11. The method for producing a semiconductor device according to claim 1 , wherein
the silicon crystal nuclei, the first amorphous silicon, and the second amorphous silicon are deposited on a desired contact region on the substrate;
the first amorphous silicon and the second amorphous silicon are etched to leave a portion thereof on the contact region; and
the region other than the contact region is filled with an insulating film.
12. The method for producing a semiconductor device according to claim 1 , further comprising the step of depositing third amorphous silicon on the first and second amorphous silicon before the step of crystallizing the first amorphous silicon, the second amorphous silicon, and the third amorphous silicon by allowing the crystal nuclei to grow in the solid phase.
13. The method for producing a semiconductor device according to claim 12 , wherein the solid-phase growth rate of crystals in the third amorphous silicon is adjusted to a lower rate than that of crystals in the second amorphous silicon.
14. The method for producing a semiconductor device according to claim 12 , wherein the impurity concentration of the third amorphous silicon is adjusted to a lower concentration than that of the second amorphous silicon.
15. The method for producing a semiconductor device according to claim 12 , wherein the step of forming the silicon crystal nuclei, the step of depositing the first amorphous silicon, the step of depositing the second amorphous silicon, and the step of depositing the third amorphous silicon are continuously performed in the same reaction chamber by LP-CVD.
16. The method for producing a semiconductor device according to claim 15 , wherein the step of forming the third amorphous silicon is performed by LP-CVD at 520° C. to 540° C. and 90 Pa or more in a gas system mainly containing silane gas or disilane gas.
17. A semiconductor device produced by the method according to claim 1 .
18. A method for producing a semiconductor device, comprising the steps of:
forming silicon crystal nuclei on a substrate;
depositing first amorphous silicon;
depositing second amorphous silicon; and
crystallizing the first amorphous silicon and the second amorphous silicon by growing the crystal nuclei in the solid phase,
wherein a contact hole on the substrate is filled with the silicon crystal nuclei, the first amorphous silicon, and the second amorphous silicon to form a contact plug.
19. A semiconductor device produced by the method according to claim 18 .
20. A method for producing a semiconductor device, comprising the steps of:
forming silicon crystal nuclei on a substrate;
depositing first amorphous silicon;
depositing second amorphous silicon; and
crystallizing the first amorphous silicon and the second amorphous silicon by growing the crystal nuclei in the solid phase,
wherein a gate electrode or wiring is formed with the first and second amorphous silicon deposited on the substrate.