Method of fabricating semiconductor device, and semiconductor device
View Patent ↗Disclosed is a method of fabricating a semiconductor device that includes field effect transistors each having a gate electrode formed only of a metal silicide which overcomes the problem of depletion of the gate and makes adjustment of a work function easier, and that has a high integration with the existing process and a high cost performance. The method fabricates a semiconductor substrate, a gate electrode formed on the semiconductor substrate via a gate insulating layer, and a source and a drain having an elevated structure with the gate electrode in between, and includes a step at which the gate electrode is silicidized to form a metal silicide.
1. A semiconductor device comprising:
a semiconductor substrate;
first and second gate electrodes formed on said semiconductor substrate via a gate insulating layer, each of the first and second electrodes having, on both sides thereof, first and second sidewall spacers comprising an insulator having silicon oxide, wherein the first sidewall spacers adjacent the first gate electrode are shorter than the second sidewall spacers adjacent the second gate electrode;
sources and drains each having elevated structures with each of the gate electrodes in between,
wherein the first gate electrode consists of a metal silicide layer, and the second gate electrode consists of a polysilicon layer and a metal silicide layer.
2. The semiconductor device according to claim 1 , wherein the gate electrodes and the sources and the drains are silicidized simultaneously.
3. The semiconductor device according to claim 1 , wherein said metal silicide layer is comprised of a material containing Co or Ni.
4. The semiconductor device according to claim 3 , wherein the gate insulating layer is comprised of a material selected from SiN, SiO2, SiON, and high-k.
5. The semiconductor device according to claim 4 , wherein an epitaxial film is selectively formed only on the sources and the drains.
6. A semiconductor device comprising:
a semiconductor substrate;
first and second gate electrodes formed on said semiconductor substrate via a gate insulating layer, each of the first and second gate electrodes having, on both sides thereof, first and second sidewall spacers comprising an insulator having silicon oxide, wherein the first sidewall spacers adjacent the first gate electrode are shorter than the second sidewall spacers adjacent the second gate electrode;
sources and drains each having elevated structures with each of the first and second gate electrodes in between, and
wherein the first gate electrode is completely silicidized, and the second gate electrode only partly silicidized.
7. The semiconductor device according to claim 6 , wherein the source and the drain formed with the first gate electrode in between contain a first conductivity type impurity.
8. The semiconductor device according to claim 6 , wherein an uppermost surface of the sidewall spacer of the second gate electrode is lower than an uppermost surface of the second gate electrode.