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App. No. 11/140,463 · Confirmation No. 2423

Method for cleaning a process chamber

Abandoned -- Failure to Respond to an Office Action View Publication ↗
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2010-12-21 ABN Abandonment 2 View
2010-10-08 EXIN Examiner Interview Summary Record (PTOL - 413) 3 View
2010-10-08 CTAV Advisory Action (PTOL-303) 2 View
2010-10-08 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 1 View
2010-09-10 A.NE Response After Final Action 1 View
2010-09-10 CLM Claims 2 View
2010-09-10 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2010-09-10 AF/D Affidavit-submitted prior to Mar 15, 2013 3 View
2010-09-10 N417 Electronic Filing System Acknowledgment Receipt 2 View
2010-09-10 TRAN.LET Transmittal Letter 1 View
2010-09-10 WFEE Fee Worksheet (SB06) 1 View
2010-06-10 CTFR Final Rejection 10 View
2010-06-10 FWCLM Index of Claims 1 View
2010-06-10 SRFW Search information including classification, databases and other search related notes 1 View
2010-03-12 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2010-03-12 CLM Claims 2 View
2010-03-12 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2010-03-12 AF/D Affidavit-submitted prior to Mar 15, 2013 3 View
2010-03-12 WFEE Fee Worksheet (SB06) 2 View
2010-03-12 N417 Electronic Filing System Acknowledgment Receipt 3 View
2010-03-12 TRAN.LET Transmittal Letter 1 View
2010-03-12 XT/ Extension of Time 2 View
2009-11-12 CTNF Non-Final Rejection 9 View
2009-11-12 FWCLM Index of Claims 1 View
2009-11-12 SRFW Search information including classification, databases and other search related notes 1 View
2009-11-04 RCEX Request for Continued Examination (RCE) 2 View
2009-11-04 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2009-11-04 CLM Claims 5 View
2009-11-04 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2009-11-04 WFEE Fee Worksheet (SB06) 2 View
2009-11-04 N417 Electronic Filing System Acknowledgment Receipt 3 View
2009-11-04 TRAN.LET Transmittal Letter 1 View
2009-11-04 WFEE Fee Worksheet (SB06) 1 View
2009-08-05 CTFR Final Rejection 10 View
2009-08-05 FWCLM Index of Claims 1 View
2009-08-05 SRFW Search information including classification, databases and other search related notes 1 View
2009-04-10 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2009-04-10 CLM Claims 5 View
2009-04-10 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2009-04-10 WFEE Fee Worksheet (SB06) 2 View
2009-04-10 N417 Electronic Filing System Acknowledgment Receipt 3 View
2009-04-10 TRAN.LET Transmittal Letter 1 View
2009-04-10 XT/ Extension of Time 2 View
2009-04-10 WFEE Fee Worksheet (SB06) 1 View
2008-12-12 CTNF Non-Final Rejection 10 View
2008-12-12 FWCLM Index of Claims 1 View
2008-12-12 SRFW Search information including classification, databases and other search related notes 1 View
2008-09-26 RCEX Request for Continued Examination (RCE) 4 View
2008-09-26 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2008-09-26 CLM Claims 4 View
2008-09-26 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2008-09-26 WFEE Fee Worksheet (SB06) 1 View
2008-08-22 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 3 View
2008-08-22 CTAV Advisory Action (PTOL-303) 3 View
2008-07-29 A.NE Response After Final Action 3 View
2008-07-29 CLM Claims 4 View
2008-07-29 REM Applicant Arguments/Remarks Made in an Amendment 5 View
2008-07-29 WFEE Fee Worksheet (SB06) 1 View
2008-05-29 CTFR Final Rejection 10 View
2008-05-29 FWCLM Index of Claims 1 View
2008-05-29 SRFW Search information including classification, databases and other search related notes 1 View
2008-02-01 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2008-02-01 CLM Claims 4 View
2008-02-01 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2008-02-01 WFEE Fee Worksheet (SB06) 2 View
2008-02-01 N417 Electronic Filing System Acknowledgment Receipt 2 View
2008-02-01 LET. Miscellaneous Incoming Letter 1 View
2008-02-01 WFEE Fee Worksheet (SB06) 1 View
2007-12-03 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2007-10-01 CTNF Non-Final Rejection 9 View
2007-10-01 892 List of references cited by examiner 1 View
2007-10-01 FWCLM Index of Claims 1 View
2007-10-01 SRFW Search information including classification, databases and other search related notes 1 View
2007-09-26 SRNT Examiner's search strategy and results 2 View
2007-09-20 SRNT Examiner's search strategy and results 7 View
2007-09-19 SRNT Examiner's search strategy and results 4 View
2007-07-19 RCEX Request for Continued Examination (RCE) 2 View
2007-07-19 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2007-07-19 CLM Claims 4 View
2007-07-19 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2007-07-19 WFEE Fee Worksheet (SB06) 1 View
2007-06-04 CTAV Advisory Action (PTOL-303) 3 View
2007-06-04 BIB Bibliographic Data Sheet 1 View
2007-06-04 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 1 View
2007-05-14 A.NE Response After Final Action 2 View
2007-05-14 CLM Claims 4 View
2007-05-14 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2007-05-14 WFEE Fee Worksheet (SB06) 1 View
2007-02-20 CTFR Final Rejection 7 View
2007-02-20 FWCLM Index of Claims 1 View
2007-02-20 BIB Bibliographic Data Sheet 1 View
2006-12-05 WFEE Fee Worksheet (SB06) 1 View
2006-11-16 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2006-11-16 CLM Claims 4 View
2006-11-16 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2006-08-16 CTNF Non-Final Rejection 8 View
2006-08-16 1449 List of References cited by applicant and considered by examiner 2 View
2006-08-16 892 List of references cited by examiner 1 View
2006-08-16 FWCLM Index of Claims 1 View
2006-08-16 SRFW Search information including classification, databases and other search related notes 1 View
2006-08-16 BIB Bibliographic Data Sheet 1 View
2006-08-10 SRNT Examiner's search strategy and results 2 View
2006-07-20 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2006-07-20 FOR Foreign Reference 4 View
2006-07-20 FOR Foreign Reference 6 View
2006-07-20 FOR Foreign Reference 16 View
2006-07-20 FOR Foreign Reference 9 View
2006-07-20 FOR Foreign Reference 10 View
2006-07-20 FOR Foreign Reference 8 View
2006-07-20 FOR Foreign Reference 41 View
2006-07-20 FOR Foreign Reference 19 View
2006-07-20 FOR Foreign Reference 30 View
2006-07-20 FOR Foreign Reference 30 View
2006-05-22 ELC. Response to Election / Restriction Filed 2 View
2006-05-22 CLM Claims 3 View
2006-05-22 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2006-05-22 WFEE Fee Worksheet (SB06) 1 View
2006-05-22 FWCLM Index of Claims 1 View
2006-04-21 CTRS Requirement for Restriction/Election 7 View
2006-04-21 FWCLM Index of Claims 1 View
2006-04-21 BIB Bibliographic Data Sheet 1 View
2005-08-31 PEFR Applicant Response to Pre-Exam Formalities Notice 5 View
2005-08-31 OATH Oath or Declaration filed 24 View
2005-07-08 PEFN Pre-Exam Formalities Notice 2 View
2005-05-27 TRNA Transmittal of New Application 2 View
2005-05-27 SPEC Specification 13 View
2005-05-27 CLM Claims 5 View
2005-05-27 ABST Abstract 1 View
2005-05-27 DRW Drawings-only black and white line drawings 1 View
2005-05-27 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2005-05-27 FOR Foreign Reference 19 View
2005-05-27 FOR Foreign Reference 29 View
2005-05-27 FOR Foreign Reference 16 View
2005-05-27 FOR Foreign Reference 9 View
2005-05-27 FOR Foreign Reference 6 View
2005-05-27 FOR Foreign Reference 16 View
2005-05-27 FOR Foreign Reference 9 View
2005-05-27 FOR Foreign Reference 4 View
2005-05-27 FOR Foreign Reference 39 View
2005-05-27 FOR Foreign Reference 39 View
2005-05-27 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
11/140,463
Filed
2005-05-27
Pub. No.
US20050279382A1
Art Unit
1711