Method of varying dimensions of a substrate during nano-scale manufacturing
View Patent ↗The present invention is directed toward a method to vary dimensions of a substrate supported by a chuck. The method includes applying compressive forces to the substrate with the actuator assembly while facilitating movement of the actuator assembly with respect to the substrate to minimize reactive forces generated in response to the compressive forces being sensed by the chuck.
1. A method to vary dimensions of a substrate supported by a chuck, said substrate having an edge facing bodies of an actuator assembly, said method comprising:
applying compressive forces to said substrate with said actuator assembly;
facilitating movement of said actuator assembly with respect to said chuck to minimize reactive forces generated in response to said compressive forces being sensed by said chuck; and
arranging said bodies about a perimeter defining an area, positioning said substrate in said area, and coupling a subset of said bodies to differing lever arms, with applying further including imparting angular motion onto one of said bodies along a direction extending transversely to said axis to reduce said area, with said direction being substantially constant over a range of motion of said lever arm about said axis.
2. The method as recited in claim 1 wherein applying compressive forces further includes contacting said edge with said bodies to apply a plurality of forces to said edge.
3. The method as recited in claim 1 further including holding said substrate against said chuck with a chucking force with said chucking force being a sufficient strength to minimize rotational and translational movement of said substrate with respect to said chuck in the presence of said compressive forces.
4. The method as recited in claim 1 wherein said substrate includes a pattern and applying further includes establishing a force differential to vary characteristics of said pattern and said compressive forces to establish dimensions of said substrate to satisfy predetermined criteria.
5. The method as recited in claim 1 wherein imparting further includes subjecting said lever arm to a first force, and producing a second force upon one of said plurality of bodies of said subset, with a magnitude of said second force being a multiple of a magnitude of said first force.
6. The method as recited in claim 1 wherein imparting further includes contacting an edge of said substrate with said one of said bodies and generating angular movement between said one of said bodies and said lever arm along two additional axes to compensate for obliqueness of said edge with respect to said axis.
7. A method for varying dimensions of a mold included in a template, said template having an edge facing a plurality of bodies of an actuator assembly, with said method comprising:
disposing said template between said plurality of bodies disposed about a perimeter defining an area, with said template lying in said area, a subset of said plurality of bodies being coupled to differing lever arms defining a plurality of lever arms each of which is adapted to undergo angular motion about an axis;
imparting said angular motion onto one of said plurality of bodies along a direction extending transversely to said axis to reduce said area and compress said template; and
facilitating movement of said actuator assembly with respect to said chuck to minimize reactive forces generated in response to said compressive forces being sensed by said chuck.
8. The method as recited in claim 7 further including holding said template against said chuck with a chucking force, said chucking force being a sufficient strength to minimize rotational and translational movement of said template with respect to said chuck in the presence of a compression of said template resulting from said area being reduced.
9. The method as recited in claim 7 wherein imparting further includes establishing said direction to be substantially constant over a range of motion of said lever arm about said axis.
10. The method as recited in claim 7 wherein said mold includes a pattern and imparting further includes establishing a force differential to vary characteristics of said pattern and apply compressive forces to said template to establish dimensions of said template to satisfy predetermined criteria.
11. The method as recited in claim 7 wherein imparting further includes subjecting said lever arm to a first force, and producing a second force upon one of said plurality of bodies of said subset, with a magnitude of said second force being a multiple of a magnitude of said first force.
12. The method as recited in claim 7 wherein imparting further includes contacting an edge of said substrate with said one of said bodies and generating angular movement between said one of said bodies and said lever arm along two additional axes to compensate for obliqueness of said edge with respect to said axis.
13. A method for varying dimensions of a substrate, said method comprising:
disposing said substrate between a plurality of bodies disposed about a perimeter defining an area, with said substrate lying in said area and a subset of said plurality of bodies being coupled to a lever arm;
producing angular motion in said lever arm about an axis;
imparting said angular motion onto one of said plurality of bodies along a direction extending transversely to said axis to reduce said area, with said direction being substantially constant over a range of motion of said lever arm about said axis.
14. The method as recited in claim 13 wherein imparting further includes contacting an edge of said substrate with said one of said plurality of bodies and generating angular movement between said one of said plurality of bodies and said lever arm along an additional axis to compensate for obliqueness of said edge with respect to said axis.
15. The method as recited in claim 13 wherein imparting further includes contacting an edge of said substrate with said one of said plurality of bodies and generating angular movement between said one of said plurality of bodies and said lever arm along two additional axes to compensate for obliqueness of said edge with respect to said axis.
16. The method as recited in claim 13 wherein imparting further includes subjecting said lever arm to a first force, and producing a second force upon said one of said plurality of bodies in response to said first force, with a magnitude of said second force being greater than a magnitude of said first force.
17. The method as recited in claim 13 wherein imparting further includes subjecting said lever arm to a first force, and producing a second force upon said one of said plurality of bodies in response to said first force, with a magnitude of said second force being a multiple of a magnitude of said first force.