Exposure system and pattern formation method
View Patent ↗An exposure system includes a cleaning unit for cleaning a surface of a resist film formed on a wafer with a cleaning fluid and an exposure unit for performing pattern exposure with an immersion liquid provided between the resist film and a projection lens.
1. A pattern formation method comprising the steps of:
forming a resist film on a substrate;
cleaning a surface of said resist film;
after the step of cleaning said resist film, performing pattern exposure by selectively irradiating said resist film with exposing light with a liquid provided on said resist film whose surface has been cleaned; and
forming a resist pattern by developing said resist film after the pattern exposure,
wherein in the step of cleaning the surface of said resist film, said resist film is cleaned by a cleaning fluid supplied from above onto the surface of said resist film.
2. The pattern formation method of claim 1 , wherein the cleaning fluid is water or ozone water.
3. The pattern formation method of claim 1 , wherein said liquid is water or perfluoropolyether.
4. The pattern formation method of claim 1 , wherein said exposing light is KrF excimer laser, ArF excimer laser, F 2 laser, Xe 2 laser, Ar 2 laser or ArKr laser.
5. The pattern formation method of claim 1 , wherein in the step of cleaning the surface of said resist film, the cleaning fluid is supplied from a nozzle.
6. The pattern formation method of claim 5 , wherein the cleaning fluid is dropped from the nozzle.
7. The pattern formation method of claim 1 ,
wherein the step of performing pattern exposure includes the steps of;
supplying the liquid between the substrate and a projection lens;
discharging the liquid between the substrate and the projection lens; and
moving the substrate during the exposure,
wherein the step of supplying the liquid, the step of discharging the liquid and the step of moving the substrate are simultaneously performed.
8. The pattern formation method of claim 7 , wherein the step of supplying the liquid, the step of discharging the liquid and the step of moving the substrate are successively performed.
9. The pattern formation method of claim 1 ,
wherein the step of cleaning the surface of said resist film includes the steps of:
supplying the cleaning fluid; and
rotating the substrate.
10. The pattern formation method of claim 9 , wherein the step of supplying the cleaning fluid and the step of rotating the substrate are simultaneously performed.
11. The pattern formation method of claim 1 , wherein said resist film is a chemically amplified resist film.
12. A pattern formation method comprising the steps of:
forming a resist film on a substrate;
cleaning a surface of said resist film;
after the step of cleaning said resist film, performing pattern exposure by selectively irradiating, with exposing light, said resist film whose surface has been cleaned; and
forming a resist pattern by developing said resist film after the pattern exposure,
wherein in the step of cleaning the surface of said resist film, said resist film is cleaned by a cleaning fluid supplied from above onto the surface of said resist film.
13. The pattern formation method of claim 12 , wherein the cleaning fluid is water or ozone water.
14. The pattern formation method of claim 12 , wherein said exposing light is KrF excimer laser, ArF excimer laser, F 2 laser, Xe 2 laser, Ar 2 laser or ArKr laser.
15. The pattern formation method of claim 12 , wherein in the step of cleaning the surface of said resist film, the cleaning fluid is supplied from a nozzle.
16. The pattern formation method of claim 15 , wherein the cleaning fluid is dropped from the nozzle.
17. The pattern formation method of claim 12 ,
wherein the step of cleaning the surface of said resist film includes the steps of:
supplying the cleaning fluid; and
rotating the substrate.
18. The pattern formation method of claim 17 , wherein the step of supplying the cleaning fluid and the step of rotating the substrate are simultaneously performed.
19. The pattern formation method of claim 12 , wherein said resist film is a chemically amplified resist film.
20. A pattern formation method comprising the steps of:
forming a resist film on a substrate;
cleaning said substrate on which said resist film has been formed;
after the step of cleaning said resist film, performing pattern exposure by selectively irradiating said resist film with exposing light with a liquid provided on said substrate which has been cleaned; and
forming a resist pattern by developing said resist film after the pattern exposure,
wherein in the step of cleaning said substrate, said substrate is cleaned by a cleaning fluid supplied from above onto the surface of said substrate on which said resist film has been formed.