Selective and non-selective epitaxy for base integration in a BiCMOS process and related structure
View Patent ↗According to one exemplary embodiment, a bipolar transistor includes an active area situated between first and second isolation regions in a substrate. The bipolar transistor further includes an epitaxial extension layer situated on the active area, where the epitaxial extension layer extends over the first and second isolation regions. The bipolar transistor further includes a base layer situated on the epitaxial extension layer, where the base layer includes an epitaxial base, and where the epitaxial base includes a usable emitter formation area. The active area has a first width and the usable emitter formation area has a second width, where the second width is at least as large as the first width.
1. A method of fabricating a bipolar transistor, said method comprising steps of:
forming an epitaxial extension layer on an active area, said active area being situated between first and second isolation regions in a substrate, said epitaxial extension layer extending over said first and second isolation regions;
forming a base layer on said epitaxial extension layer and on said first and second isolation regions, said base layer comprising an epitaxial base, said epitaxial base comprising a usable emitter formation area.
2. The method of claim 1 wherein said active area has a first width and said usable emitter formation area has a second width, wherein said second width is at least as large as said first width.
3. The method of claim 1 wherein said step of forming said epitaxial extension layer on said active area comprises using a selective epitaxial deposition process to form said epitaxial extension layer.
4. The method of claim 1 wherein said step of forming said base layer on said epitaxial extension layer and on said first and second isolation regions comprises using a non-selective epitaxial deposition process to form said base layer.
5. The method of claim 1 further comprising a step of forming an emitter on said epitaxial base.
6. The method of claim 1 wherein said base layer comprises first and second polycrystalline base layer segments, wherein said first polycrystalline base layer segment is situated on said first isolation region and said second polycrystalline base layer segment is situated on said second isolation region.
7. The method of claim 5 wherein said epitaxial base comprises an intrinsic base region, wherein said intrinsic base region is situated under said emitter.
8. The method of claim 1 wherein said epitaxial base comprises single-crystal silicon.
9. The method of claim 1 wherein said epitaxial base comprises single-crystal silicon-germanium.
10. The method of claim 1 wherein said epitaxial extension layer comprises single-crystal silicon.
11. A bipolar transistor comprising:
an active area situated between first and second isolation regions in a substrate;
an epitaxial extension layer situated on said active area, said epitaxial extension layer extending over said first and second isolation regions;
a base layer situated on said epitaxial extension layer, said base layer comprising an epitaxial base, said epitaxial base comprising a usable emitter formation area;
wherein said base layer further comprises first and second polycrystalline base layer segments, wherein said first polycrystalline base layer segment is situated on said first isolation region and said second polycrystalline base layer segment is situated on said second isolation region.
12. The bipolar transistor of claim 11 further comprising a collector region situated under said epitaxial extension layer, wherein said epitaxial extension layer causes a reduction in capacitance between said collector region and at least one extrinsic base region.
13. A bipolar transistor comprising:
an active area situated between first and second isolation regions in a substrate;
an epitaxial extension layer situated on said active area, said epitaxial extension layer extending over said first and second isolation regions;
a base layer situated on said epitaxial extension layer, said base layer comprising an epitaxial base, said epitaxial base comprising a usable emitter formation area;
wherein said epitaxial extension layer forms a single-crystal semiconductor material on said active area and over said first and second isolation regions, wherein said active area has a first width and said usable emitter formation area has a second width, wherein said second width is at least as large as said first width.
14. The bipolar transistor of claim 13 wherein said epitaxial extension layer causes said second width to be at least as large as said first width.