Granted Patent B1

US 7,220,643 · App. 11/147,207 · Granted May 22, 2007

Abstract

Claims (64)

1. A method for forming a memory device, comprising:

forming a memory cell stack over a substrate,

wherein the memory cell stack includes a first layer formed over the substrate and a second layer formed over the first layer;

forming a dielectric layer over the first and second layers and the substrate;

etching the dielectric layer to expose at least an upper surface of the memory cell stack;

etching the second layer to recess the second layer with respect to an upper surface of the dielectric layer; and

forming a silicide region on the second layer in the memory cell stack,

wherein the silicide region in each memory cell stack is bounded by the dielectric layer extending above the upper surface of the memory cell stack.

2. The method of claim 1 , further comprising:

forming a first dielectric layer on the substrate; and

forming a charge storage element on the first dielectric layer, where the first layer comprises an oxide layer formed on the charge storage element.

3. The method of claim 1 , wherein the second layer comprises a polysilicon layer.

4. The method of claim 1 , wherein the second layer has an initial thickness ranging from about 500 Å to about 2500 Å.

5. The method of claim 1 , wherein the second layer is etched about 50 Å to about 100 Å below the upper surface of the dielectric layer.

6. The method of claim 1 , wherein forming the memory cell stack further comprises:

forming a mask over the second layer;

forming spacers adjacent opposite side surfaces of the mask;

etching the second layer outside of the spacers to form the memory cell stack; and

removing the mask and the spacers.

7. The method of claim 6 , wherein the mask is formed of silicon oxide.

8. The method of claim 6 , wherein the mask has a thickness ranging from about 500 Å to about 1500 Å and a width ranging from about 500 Å to about 2000 Å.

9. The method of claim 6 , wherein forming spacers comprises:

depositing a spacer layer over the memory device; and

etching the spacer layer to form the spacers adjacent opposite side surfaces of the mask.

10. The method of claim 6 , wherein the spacers are formed of silicon oxide.

11. The method of claim 1 , wherein etching the second layer comprises:

etching the second layer using a wet chemical etch.

12. The method of claim 1 , wherein etching the second layer comprises:

removing an upper portion of the second layer ranging from about 100 Å to about 300 Å in thickness.

13. The method of claim 1 , wherein the dielectric layer comprises a silicon nitride.

14. The method of claim 1 , wherein the forming a silicide region comprises:

depositing a metal on the second layer of the memory cell stack, and

thermally annealing the memory device to create the silicide region on the second layer of the memory cell stack.

15. The method of claim 14 , wherein thermally annealing comprises:

annealing the memory device at a temperature ranging from about 400° C. to about 600° C. to form a metal-silicon compound,

removing unreacted metal from the memory device, and

thermally annealing the memory device at a temperature ranging from about 700° C. to about 900° C. to change the metal-silicon compound to a metal silicide to create the silicide region on the second layer of the memory cell stack.

16. The method of claim 1 , wherein etching the dielectric layer comprises wet chemical etching the dielectric layer.

17. The method of claim 1 , wherein etching the dielectric layer comprises dry plasma etching the dielectric layer.

18. The method of claim 1 , comprising:

forming a charge storage layer above the first layer, wherein the first layer is a tunnel oxide layer; and

forming an intergate dielectric layer above the charge storage layer,

wherein the second layer is a control gate layer formed over the intergate dielectric layer.

19. A method for fabricating a semiconductor device, comprising:

forming a gate layer over a substrate;

forming at least one mask over the gate layer;

etching the gate layer to form at least one memory cell stack using the at least one mask;

removing the at least one mask;

forming a dielectric layer over the substrate and the at least one memory cell stack;

etching the dielectric layer to expose at least an upper surface of the at least one memory cell stack;

etching the gate layer to recess the gate layer with respect to an upper surface of the dielectric layer; and

forming a silicide region within the gate layer, wherein the silicide region is bounded by the dielectric layer.

20. A method for making a semiconductor memory device, comprising:

forming at least one memory cell stack over a substrate, wherein the at least one memory cell stack comprises:

a first dielectric layer formed on the substrate,

a charge storage element formed on the first dielectric layer,

an intergate dielectric formed on the charge storage element, and

a gate layer formed over the intergate dielectric;

forming a mask over the gate layer;

forming a dielectric layer over the semiconductor memory device;

etching the dielectric layer to expose at least an upper surface of the mask;

removing the mask;

etching the gate layer to recess the gate layer with respect to an upper surface of the dielectric layer; and

forming a silicide region in the gate layer, wherein the silicide region is prevented from extending into the dielectric layer.

Assignments (7)