Method for manufacturing CMOS image sensor
View Patent ↗A method for manufacturing a CMOS image sensor is provided. The method includes forming a gate electrode on a semiconductor layer having defined regions of a photodiode region and a logic region, such that a gate oxide film is interposed between the semiconductor layer and the gate electrode; forming sidewall insulating films at both sides of the gate electrode, followed by forming a salicide-preventing film over an overall surface of the gate electrode and insulating films; removing the salicide-preventing film formed in the logic region; and removing a portion of the sidewall insulating films exposed by removing the salicide-preventing film, thereby exposing an upper side surface of the gate electrode.
1. A method for manufacturing a CMOS image sensor, comprising:
preparing a semiconductor substrate having a photodiode region and a logic region;
forming a first gate electrode on the photodiode region and a second gate electrode on the logic region, such that a gate oxide film is interposed between the semiconductor layer and the first and second gate electrodes;
forming sidewall insulating films at both sides of the first and second gate electrodes;
forming a salicide-preventing film over an overall surface of the semiconductor substrate including the first and second gate electrodes and the sidewall insulating films;
removing a portion of the salicide-preventing film so as to cover the photodiode region and to expose the logic region and a portion of the sidewall insulating film of the first gate electrode; and
removing a portion of the sidewall insulating films exposed by removing the salicide-preventing film, thereby exposing an upper side surface of the first and second gate electrodes.
2. The method as set forth in claim 1 , further comprising:
forming a salicide film on the exposed first and second gate electrodes using the salicide-preventing film as a mask after exposing the upper side surface of the first and second gate electrodes.
3. The method as set forth in claim 1 , wherein the sidewall insulating film is formed of one of a single insulating film and a stacked film formation comprising first and second insulating films having different etching ratios.
4. The method as set forth in claim 3 , wherein the first insulating film is an oxide-based insulating film.
5. The method as set forth in claim 3 , wherein the second insulating film is a nitride insulating film.
6. The method as set forth in claim 3 , wherein the first insulating film has a thickness of 100˜300 Å.