Method of forming an interlayer dielectric
View Patent ↗A method for forming a semiconductor device comprises providing a semiconductor substrate; forming a first stressor layer over a surface of the semiconductor substrate; selectively removing portions of the first stressor layer; forming a second stressor layer over the surface of the semiconductor substrate and the first stressor layer; and selectively removing portions of the second stressor layer using an isotropic etch. In one embodiment, the isotropic etch is a wet etch that selectively removes the second stressor layer without removing a significant amount of the first stressor layer and also planarizing a boundary between the first stressor layer and the second stressor layer.
1. A method for forming a semiconductor device comprising:
providing a semiconductor substrate;
forming a first stressor layer of silicon-lean silicon nitride over a surface of the semiconductor substrate, wherein the first stressor has compressive stress;
selectively removing portions of the first stressor layer to leave a remaining portion;
forming a second stressor layer of silicon-lean silicon nitride over the surface of the semiconductor substrate and the remaining portion of the first stressor layer, wherein the second stressor layer has tensile stress;
forming a photoresist layer over the second stressor layer;
patterning the photoresist layer to leave a portion of the photoresist layer that overlaps the remaining portion of the first stressor layer and exposes a first portion of the second stressor layer; and
applying a wet chemistry comprising hydrofluoric acid to the portion of the photoresist layer and the first portion of the second stressor layer, wherein wet chemistry comprising hydrofluoric acid is characterized by etching the second stressor layer at a greater rate than the first stressor layer.
2. The method of claim 1 , wherein the step of applying is further characterized by the greater rate being about 12 to 1.
3. The method of claim 1 , wherein the step of applying is further characterized by continuing after the first portion of the second stressor layer has been removed until all of the second stressor layer that is over the remaining portion of the first stressor layer is removed.
4. The method of claim 1 , wherein the semiconductor substrate is characterized as being a silicon-on-insulator (SOI) substrate.
5. The method of claim 1 , wherein the first and second stressor layers are both formed using plasma enhanced chemical vapor deposition (PECVD).
6. A method for forming a semiconductor device comprising:
providing a semiconductor substrate;
forming a first plurality of transistors on a first portion of the semiconductor substrate;
forming a second plurality of transistors on a second portion of the semiconductor substrate;
forming a first stressor layer of silicon-lean silicon nitride over the first and second pluralities of transistors having compressive stress;
selectively removing the first stressor layer from over the first plurality of transistors to leave a remaining portion of the first stressor layer;
forming a second stressor layer of silicon-lean silicon nitride over remaining portion of the first stressor layer and the first and second pluralities of transistors, wherein the second stressor layer has tensile stress;
forming a photoresist layer over the second stressor layer;
patterning the photoresist layer to leave a portion of the photoresist layer that overlaps the remaining portion of the first stressor layer and exposes a first portion of the second stressor layer; and applying a wet chemistry comprising hydrofluoric acid to the portion of the of the photoresist layer and the first portion of the second stressor layer, wherein wet chemistry comprising hydrofluoric acid is characterized by etching the second stressor layer at a greater rate than the first stressor layer.
7. The method of claim 6 , wherein channel regions of the first and second pluralities of transistors are oriented in a direction in a semiconductor wafer.
8. The method of claim 6 , wherein the first plurality of transistors has an N conductivity type and the second plurality of transistors has a P conductivity type.
9. The method of claim 6 , wherein the step of applying is further characterized by the greater rate being about 12 to 1.
10. The method of claim 6 , wherein portions of the second stressor layer further comprises selectively removing the step of applying is further characterized by continuing after the first portion of the second stressor layer has been removed until all of the second stressor layer that is over the remaining portion of the first stressor layer is removed.
11. The method of claim 6 , further comprising forming an electrical contact with at least one transistor of the first or second pluralities of transistors at a boundary between the first stressor layer and the second stressor layer.
12. The method of claim 6 , wherein forming the first and second stressor layers comprises forming the first and second stressor layers to be between about 30 and 100 nanometers thick.
13. A method for forming a semiconductor device comprising:
providing a semiconductor substrate;
forming a plurality of N-channel transistors on a first portion of the semiconductor substrate;
forming a plurality of P-channel transistors on a second portion of the semiconductor substrate, wherein the second portion is adjacent to the first portion;
forming a compressive stressor layer of silicon-lean silicon nitride over the plurality of N-channel transistors and over the plurality of P-channel transistors;
selectively removing the compressive stressor layer from over the plurality N-channel of transistors to leave a remaining portion of the compressive stressor layer;
forming a tensile stressor layer of silicon-lean silicon nitride over the remaining portion of the compressive stressor layer and the plurality of P-channel transistors; and
forming a photoresist layer over the compressive stressor layer;
patterning the photoresist layer to leave a portion of the photoresist layer that overlaps the remaining portion of the compressive stressor layer and exposes a first portion of the tensile stressor layer; and
applying a wet chemistry comprising hydrofluoric acid to the portion of the of the photoresist layer and the first portion of the second stressor layer, wherein wet chemistry comprising hydrofluoric acid is characterized by etching the second stressor layer at a greater rate than the first stressor layer.
14. The method of claim 13 , wherein the first portion is isolated from the second portion using shallow trench isolation, and wherein an electrical contact to at least one transistor of the plurality of N-channel transistors or the plurality of P-channel transistors is formed at a boundary between the first and second portions.
15. The method of claim 13 wherein the compressive stressor layer and the tensile stressor layer are both formed using plasma enhanced chemical vapor deposition (PECVD).