Method and apparatus for polishing a semiconductor device
View Patent ↗A method and an apparatus for polishing a semiconductor wafer are provided. An initial thickness of the semiconductor wafer is actually measured to obtain a measured initial thickness value. First and second inter-positions are then set or determined with reference to the measured initial thickness value. The first and second inter-positions are predetermined taking into account any variation in the initial thickness of the semiconductor wafer. A polishing process is carried out under control to a motion of a polishing pad toward a stage, on which the semiconductor pad is held.
1. A method for polishing a semiconductor wafer comprising:
placing the semiconductor wafer on a first surface of a retainer, the semiconductor wafer having a second surface which is opposite to said retainer and which is to be polished by a polishing pad;
measuring an initial thickness of the semiconductor wafer to obtain a measured initial thickness value;
causing said polishing pad to relatively move at a predetermined first moving speed from a predetermined first position to a second position, said second position being set between said first position and said second surface, and being spaced from said first surface by a first sum of said measured initial thickness value of the semiconductor wafer and a predetermined first correction value; and
causing said polishing pad to relatively move at a second moving speed from which is lower than said first moving speed from said second position to a third position while conducting an initial polishing process to polish said semicondictor wafer using said polishing pad, said third position being set between said second position and said first surface, and being spaced from said first surface by a first remainder obtained by subtracting a predetermined second correction value from said measured initial thickness value.
2. The method of polishing the semiconductor wafer according to claim 1 , further comprising:
predetermining a final target thickness value of the semiconductor wafer,
setting a polishing end position with reference to said final target thickness value, and
conducting a post-polishing process following said initial polishing process to polish said semiconductor wafer until said polishing pad reaches said polishing end position.
3. The method of polishing the semiconductor wafer according to claim 2 , further comprising:
predetermining a third moving speed being higher than said second moving speed,
predetermining a fourth moving speed being lower than said first, second and third moving speeds, and
wherein conducting said post-polishing process further comprises conducting a first post-polishing process following said initial polishing process to polish said semiconductor wafer at said third moving speed, and conducting a second post-polishing process following said first post-polishing process to polish said semiconductor wafer at said fourth moving speed.
4. The method of polishing the semiconductor wafer according to claim 3 , further comprising:
predetermining a third correction value,
setting a fourth position between said third position and said polishing end position, said fourth position being spaced from said first surface by a second sum of said final target thickness value and said third correction value, and
wherein conducting said first post-polishing process comprises polishing said semiconductor wafer until said polishing pad reaches said fourth position.
5. The method of polishing the semiconductor wafer according to claim 4 , wherein
conducting said second post-polishing process comprises polishing said semiconductor wafer until said polishing pad reaches said polishing end position.