Low dielectric constant group II-VI insulator
View Patent ↗Low dielectric constant group II-VI compounds, such as zinc oxide, and fabrication methods are disclosed. Low dielectric constant insulator materials are fabricated by doping zinc oxide with at least one mole % p-type dopant ion. Low dielectric constant zinc oxide insulator materials are fabricated by doping zinc oxide with silicon having a concentration of at least 10 17 atoms/cm 3 . Low dielectric zinc oxide insulator materials are fabricated by doping zinc oxide with a dopant ion having a concentration of at least about 10 18 atoms/cm 3 , followed by heating to a temperature which converts the zinc oxide to an insulator. The temperature varies depending upon the choice of dopant. For arsenic, the temperature is at least about 450° C.; for antimony, the temperature is at least about 650° C. The dielectric constant of zinc oxide semiconductor is lowered by doping zinc oxide with a dopant ion at a concentration at least about 10 18 to about 10 19 atoms/cm 3 .
1. A method of fabricating a low dielectric constant group II-VI insulator material comprising:
obtaining a group II-VI material comprising atoms of group II elements and atoms of group VI elements and a p-type dopant that substitutes for atoms of the group VI element, wherein the dopant has a concentration of at least about ¼ mole % in the group II-VI material; and
heating the group II-VI material for a time period of at least 10 minutes at a temperature sufficient to convert the group II-VI material to a low dielectric constant insulator.
2. The method according to claim 1 , wherein the group II-VI material is zinc oxide.
3. The method according to claim 2 , wherein the dopant is arsenic and the temperature is about 450° C.
4. The method according to claim 2 , wherein the dopant is antimony and the temperature is about 650° C.
5. The method according to claim 2 , wherein the dopant is selected from the group consisting of nitrogen, phosphorus, arsenic, and antimony.
6. The method according to claim 2 , wherein the dopant is selected from the group consisting of arsenic and antimony.
7. The method according to claim 1 , wherein the dopant has a concentration of at least 1 mole % in the group II-VI material.
8. The method according to claim 2 , wherein the dopant has a concentration greater than 1 mole % in the zinc oxide material.