Metal oxide semiconductor transistor device
View Patent ↗A metal-oxide-semiconductor (MOS) transistor device is provided. The MOS transistor device includes a substrate, a gate structure, a spacer, a source/drain region and a barrier layer. The gate structure is disposed on the substrate. The gate structure includes a gate and a gate dielectric layer disposed between the gate and the substrate. The spacer is disposed on the sidewall of the gate structure. The source/drain region is disposed in the substrate on two sides of the spacer. The barrier layer is disposed around the source/drain region. The source/drain region and the barrier layer are fabricated using an identical material. However, the doping concentration of the source/drain region is larger than the doping concentration of the barrier layer.
1. A metal-oxide-semiconductor (MOS) transistor device, comprising:
a substrate;
a gate structure disposed on the substrate, wherein the gate structure further includes a gate and a gate dielectric layer disposed between the gate and the substrate;
a spacer disposed on the respective sidewalls of the gate structure;
a source/drain region disposed in the substrate on two sides of the spacer; and
a barrier layer around the source/drain region having dopants being of no more than one conductive type, wherein the source/drain region and the barrier layer are fabricated using an identical material and the source/drain region has a dopant concentration higher than the barrier layer.
2. The MOS transistor device of claim 1 , wherein material constituting the source/drain region and the barrier layer includes silicon germanium.
3. The MOS transistor device of claim 2 , wherein the dopants inside the source/drain region include boron.
4. The MOS transistor device of claim 2 , wherein the concentration of dopants in the barrier layer is zero.
5. The MOS transistor device of claim 1 , wherein the material constituting the source/drain region and the barrier layer includes silicon carbide.
6. The MOS transistor device of claim 5 , wherein the dopants in the source/drain region include phosphorus or arsenic.
7. The MOS transistor device of claim 5 , wherein the concentration of dopants in the barrier layer is zero.
8. The MOS transistor device of claim 1 , wherein the surface of the source/drain region is at higher level than the surface of the substrate.
9. The MOS transistor device of claim 1 , wherein the substrate is selected from a group consisting of P-doped silicon substrate, N-doped silicon substrate, silicon-on-insulator (SOI) substrate, silicon carbide on insulator substrate, silicon germanium on insulator substrate, gallium arsenic substrate, indium-phosphorus substrate, silicon germanium substrate, a substrate comprising a germanium layer disposed over a silicon layer, a substrate comprising a silicon carbide layer disposed over a silicon layer and a substrate comprising a silicon germanium layer over a silicon layer.
10. The MOS transistor device of claim 1 , wherein the material constituting the gaze is selected from a group consisting of polysilicon, metal, polycide and composite layer comprising polysilicon and metal nitride.
11. The MOS transistor device of claim 10 , wherein if the material constituting the gate is the composite layer comprising the polysilicon and the metal nitride, the metal nitride includes titanium nitride.
12. The MOS transistor device of claim 1 , wherein the material constituting the gate dielectric layer includes silicon oxide, silicon oxynitride or high dielectric constant material.
13. The MOS transistor device of claim 12 , wherein if the material constituting the gate dielectric layer is the high dielectric constant material, the material constituting the high dielectric constant material includes tantalum oxide or barium-strontium titanate.
14. The MOS transistor device of claim 1 , wherein the material constituting the spacer includes silicon oxide or silicon nitride.
15. The MOS transistor device of claim 1 , wherein the device further includes a metal silicide layer disposed on the source/drain region.
16. The MOS transistor device of claim 15 , wherein the material constituting the metal silicide layer includes tungsten silicide, titanium silicide, cobalt silicide, molybdenum silicide, nickel silicide, palladium silicide or platinum silicide.
17. The MOS transistor device of claim 1 , wherein the device further includes a dielectric layer disposed on the substrate.
18. The MOS transistor device of claim 11 , wherein the material constituting the dielectric layer includes silicon oxide, borophosphosilicate glass, phosphosilicate glass or low dielectric constant material.
19. The MOS transistor device of claim 18 , wherein if the material constituting the dielectric layer is the low dielectric constant material, the low dielectric constant material includes black diamond, aromatic hydrocarbon (SiLK), porous aromatic hydrocarbon (porous-SiLK), hydrogen silsesquioxane (HSQ) or methyl silsesquioxane (MSQ).