Transistor with improved tip profile and method of manufacture thereof
View Patent ↗Embodiments are an improved transistor structure and the method of fabricating the structure. In particular, a wet etch of an embodiment forms source and drain regions with an improved tip shape to improve the performance of the transistor by improving control of short channel effects, increasing the saturation current, improving control of the metallurgical gate length, increasing carrier mobility, and decreasing contact resistance at the interface between the source and drain and the silicide.
1. A method comprising:
forming an insulator on a substrate;
forming a gate on the insulator;
forming a plurality of sidewall spacers on the lateral surfaces of the gate; and
etching, with a wet etch, a source region and a drain region in the substrate, the wet etch substantially selective to a crystallographic plane in the substrate;
forming, with the wet etch, a facet in the {010} crystallographic plane of the substrate in the source region and a facet in the {010} crystallographic plane of the substrate in the drain region, the {010} facets extending laterally beneath the gate into the substrate region directly under the gate.
forming, with the wet etch, a facet in the {111} crystallographic plane of the substrate in the source region and a facet in the {111} crystallographic plane of the substrate in the drain region.
2. The method of claim 1 further comprising:
forming a source in the source region and a drain in the drain region.
3. The method of claim 2 , the source and the drain further comprising silicon germanium.
4. The method of claim 3 wherein a surface of the source and a surface of the drain are substantially flush with the surface of the substrate.
5. The method of claim 3 , the substrate comprising {001} silicon.
6. The method of claim 2 , the wet etch chemistry having a pH of greater than approximately 9.0.
7. The method of claim 2 wherein forming the source and drain comprises depositing silicon germanium or carbon-doped silicon in the source and drain regions.
8. The method of claim 1 , a wet etch chemistry selected from the group consisting of NH 4 OH, NH 3 OH, TMAH, KOH, NaOH, BTMH, an amine-based etchant, and a combination thereof.
9. A method comprising:
forming an insulator on a substrate;
forming a gate on the insulator;
forming a plurality of sidewall spacers on the lateral surfaces of the gate; and
etching, with a wet etch, a source region and a drain region in the substrate, the source region and the drain region each extending laterally beneath the gate into the substrate region directly under the gate, the source region and the drain region each further including
a facet in the {111} crystallographic plane of the substrate, and
a facet in the {010} crystallographic plane of the substrate.
10. The method of claim 9 further comprising:
forming a source in the source region and a drain in the drain region wherein a surface of the source and a surface of the drain are substantially flush with a surface of the substrate.
11. The method of claim 10 further comprising:
forming a silicide on the gate, on the source, and on the drain.
12. The method of claim 10 , the wet etch chemistry having a pH of greater than approximately 9.0.
13. The method of claim 10 wherein forming the source and drain comprises depositing silicon germanium or carbon-doped silicon in the source and drain regions.
14. The method of claim 9 , a wet etch chemistry selected from the group consisting of NH 4 OH, NH 3 OH, TMAH, KOH, NaOH, BTMH, an mine-based etchant, and a combination thereof.
15. The method of claim 9 wherein the substrate is {001} silicon.