Methods of configuring a sensor network
A sensor network collects time-series data from a process tool and supplies the data to an analysis system where pattern analysis techniques are used to identify structures and to monitor subsequent data based on analysis instructions or a composite model. Time-series data from multiple process runs are used to form a composite model of a data structure including variation. Comparison with the composite model gives an indication of tool health. A sensor network may have distributed memory for network configuration.
1. A method of configuring a sensor network that includes a plurality of nodes that are connected to a network hub, the sensor network collecting data for a user terminal, a node including one or more sensors and a smart transducer interface module, comprising:
each node of the plurality of nodes supplying identification data to the network hub, the identification data for a sensor node including the number of sensors at the sensor node and the type of each sensor at the sensor node;
assembling the identification data for the plurality of nodes at the network hub; and
downloading the assembled identification data for the plurality of nodes from the network hub to the user terminal.
2. The method of claim 1 wherein the sensor network is a DeviceNet network and the assembled identification data is an Electronic Data Sheet embedded in a DeviceNet file object.
3. The method of claim 1 further comprising using the assembled identification data for the plurality of nodes to configure a software program on the user terminal to reflect the number and types of sensors at each sensor node.
4. The method of claim 1 wherein the identification data further includes prior application information, device description and manufacturing information.
5. The method of claim 1 wherein the network hub includes stored data and wherein the assembling includes assembling data stored at the network hub.