Bake plate having engageable thermal mass
View Patent ↗A bake station comprising a bake plate adapted to heat a substrate supported on an upper surface of the bake plate, the bake plate vertically moveable between an upper baking position and a lower cooling position; and a plurality of heat sinks adapted to be engageably coupled to a lower surface of the bake plate when the bake plate is in the lower cooling position.
1. A bake station configured to heat a substrate, the bake station comprising
a bake plate adapted to heat a substrate supported on an upper surface of the bake plate, the bake plate vertically moveable between an upper baking position and a lower cooling position, wherein the bake plate further comprises an outer peripheral surface that extends between the upper and lower surfaces;
a plurality of heat sinks adapted to be engageably coupled to a lower surface of the bake plate when the bake plate is in the lower cooling position; and
a lower cup having a first surface below and opposite the lower surface of the bake plate and a side surface extending upwards from the lower surface to surround the bake plate outer peripheral surface, the lower cup having a plurality of holes formed therein to allow the plurality of heat sinks to extend through the lower cup to contact the lower surface of the bake plate.
2. The bake station set forth in claim 1 wherein the side surface of the lower cup extends above the upper surface of the bake plate.
3. The bake station set forth in claim 1 further comprising a lift adapted to move the bake plate between the baking position and the cooling position.
4. The bake station set forth in claim 1 wherein each heat sink comprises a cylindrical body.
5. The bake station set forth in claim 4 wherein each heat sink further comprises a base portion at an end of the cylindrical body that is opposite the end opposing the lower surface of the bake plate.
6. The bake station set forth in claim 1 wherein the bake plate comprises a first plurality of holes traversing between the upper and lower surface of the bake plate and wherein the bake station further comprises a plurality of lift pins corresponding to the first plurality of holes, the lift pins being adapted to hold a wafer above the bake plate.
7. The bake station set forth in claim 6 further comprising a lift operatively coupled to raise and lower the bake plate between the upper baking position and the lower wafer receiving position, wherein the lift pins extend through the upper surface of the bake plate when the bake plate positioned in the wafer receiving position and the lift pins recede below the upper surface of the bake plate when the bake plate is raised to the baking position.
8. A bake station configured to heat a substrate, the bake station comprising:
a bake plate adapted to heat a substrate supported on an upper surface of the bake plate, the bake plate vertically moveable between an upper baking position and a lower cooling position;
a plurality of heat sinks adapted to be engageably coupled to a lower surface of the bake plate when the bake plate is in the lower cooling position;
a lift adapted to move the bake plate between the baking position and the cooling position; and
a base plate having a plurality of openings that correspond to the plurality of heat sinks, wherein the bake plate is moveable in relation to the base plate between the baking position and the cooling position.
9. The bake station set forth in claim 8 wherein the plurality of openings in the base plate correspond to a plurality of retaining cavities and wherein each heat sink includes a base portion that prevents the heat sink from being pushed all the way through the opening in the base plate in the direction of the bake plate.
10. The bake station set forth in claim 9 wherein the bake station further comprises a plurality of springs and wherein each retaining cavity includes a spring that bias a respective heat sink towards the lower surface of the bake plate.