Semiconductor device having an improved voltage controlled oscillator
A semiconductor device having an improved voltage control oscillator circuit is provided. The voltage control oscillator circuit includes, in combination, a variable-capacitance element and at least one bipolar transistor on a single semiconductor substrate. The variable-capacitance element includes reversely serially connected PN junctions, and junctions are formed by a single common collector layer and separated base layers on the common collector layer. The capacitance of the variable-capacitance element is generated between respective base layers of the PN junctions with the common collector layer, and varies in correspondence with the voltage applied to the common collector layer.
1. A semiconductor device comprising:
a substrate;
a bipolar transistor on the substrate and including parts of opposite conductivity type collector and base layers that are stacked on the substrate;
a variable capacitance element on the substrate and comprising at least first, second, and third PN junctions, each of the first, second, and third PN junctions including a part of the collector layer and respective first, second, and third parts of the base layer, wherein
the first, second, and third parts of the base layer of the first, second, and third PN junctions are physically separated from each other so that the first, second, and third parts of the base layer provide respective first terminals of first, second, and third diodes that respectively include the first, second, and third PN junctions,
the collector layer of the first, second, and third PN junctions provides a common connection to the first, second, and third diodes,
the first and third parts of the base layer of first and third PN junctions provide respective first terminals of the first and third diodes which are connected serially and in reverse polarity, and
the first, second, and third parts of the base layer of the first, second, and third PN junctions are arranged along a straight line and the second part of the base layer is between the first and third parts of the base layer;
a first electrode having a comb shape and electrically connecting together the first terminals of the first and third PN junctions; and
a second electrode at least partially disposed between parts of the first electrode and electrically connected to the first terminal of the second PN junction, wherein the second electrode is physically separated from the first electrode.
2. The semiconductor device according to claim 1 , further including passive electrical elements on the substrate and connected to the bipolar transistor and the variable capacitance element in a voltage controlled oscillator circuit, the voltage controlled oscillator circuit including a variable voltage terminal connected to the part of the collector layer of the PN junctions for applying a variable voltage to vary the capacitance of the variable capacitance element.