Chip structure with redistribution traces
View Patent ↗A semiconductor chip or wafer comprises a passivation layer and a circuit line. The passivation layer comprises an inorganic layer. The circuit line is over and in touch with the inorganic layer of the passivation layer, wherein the circuit line comprises a first contact point connected to only one second contact point exposed by an opening in the passivation layer, and the positions of the first contact point and the only one second contact point from a top view are different, and the first contact point is used to be wirebonded thereto.
1. A chip package comprising:
a chip comprising:
a semiconductor substrate,
an electronic device in or on said semiconductor substrate,
a metallization structure over said semiconductor substrate,
a passivation layer over said metallization structure, wherein said passivation layer comprises a nitiide layer, an opening in said passivation layer exposing a first contact pad of said metallization structure, wherein there is no electronic device in or on said semiconductor substrate directly under said first contact pad, and
a circuit trace over said passivation layer and said first contact pad, wherein said circuit trace comprises a second contact pad connected to said first contact pad through said opening in said passivation layer, the positions of said first and second contact pads from a top perspective view being different, said second contact pad being directly over said electronic device, and wherein said circuit trace comprises a first metal layer containing gold with greater than 90 weight percent and having a thickness of between 2 and 30 microns, a second metal layer containing titanium under said first metal layer, and a third metal layer containing gold between said first and second metal layers; and
a wire wirebonded to said second contact pad.
2. The chip package claim 1 , wherein said nitride layer has a thickness of between 0.2 and 1.2 μm.
3. The chip package of claim 1 , wherein said circuit trace is directly on said nitride layer.
4. The chip package of claim 1 , wherein said electronic device comprises a MOS device.
5. The chip package of claim 1 , wherein said second metal layer comprises a titanium-tungsten alloy.
6. The chip package of claim 1 , wherein said first metal layer contains gold with greater than 97 weight percent.
7. The chip package of claim 1 further comprising a lead frame connected to said second contact pad through said wire, and a polymer structure encapsulating said wire.
8. The chip package of claim 1 , wherein said chip has a first edge and a second edge neighboring to each other, wherein the minimum distance between said first edge and said first contact pad is smaller than that between said second edge and said first contact pad, and the minimum distance between said first edge and said second contact pad is greater than that between said second edge and said second contact pad.
9. The chip package of claim 1 further comprising a polymer layer over said circuit trace, wherein an opening in said polymer layer exposes said second contact pad.
10. The chip package of claim 9 , wherein said polymer layer has a thickness of between 2 and 15 microns.
11. The chip package of claim 9 , wherein said polymer layer comprises polyimide.
12. The chip package of claim 9 , wherein said polymer layer comprises benzocyclobutene.