System and method for designing and manufacturing LSI

1. An LSI designing system comprising:

a memory;

a database configured to store a layout layer definition file; and

a control section configured to refer to said database to build up a plurality of layout layers in said memory based on said layout layer definition file,

wherein said plurality of layout layers are provided for extending directions of patterns in one of physical layers of an LSI to be formed, and

said control section divides each of said patterns into pattern structures based on said extending directions, and assigns each of said pattern structures to a corresponding one of said plurality of layout layers,

wherein said control section carries out the building up of said plurality of layout layers over all of the physical layers of the LSI to be formed, and the assignment of each of said pattern structures to a corresponding layout layer, and

wherein said database further stores a design rule file, said control section refers to said design rule file to check whether each of said plurality of layout layers meets design rules defined in said design rule file.

2. The LSI designing system according to claim 1 , wherein said control section produces a layout data for said physical layer by combining said plurality of layout layers.

3. The LSI designing system according to claim 1 , wherein said control section assigns said pattern structures to said corresponding layout layer by specifying apexes of each of said pattern structures.

4. The LSI designing system according to claim 1 , wherein said extending directions are orthogonal to each other.

5. An electron beam drawing system comprising:

an electron beam data generating system configured to generate an electron beam data for one of physical layers of an LSI to be formed; and

an electron beam drawing apparatus configured to draw a mask pattern based on said electron beam data,

wherein said electron beam data generating system comprises:

an LSI designing system configured to generate a layout data for said physical layer; and

a converting unit configured to convert said layout data into said electron beam data,

said LSI designing system comprises:

a memory;

a database configured to store a layout layer definition file; and

a control section configured to refer to said database to build up a plurality of layout layers in said memory based on said layout layer definition file,

said plurality of layout layers are provided for extending directions of patterns in said physical layer, and

said control section divides each of said patterns into pattern structures based on said extending directions, assigns each of said pattern structures to a corresponding one of said plurality of layout layers, and produces said layout data for said physical layer by combining said plurality of layout layers,

wherein said control section carries out the building up of said plurality of layout layers over all of the physical layers of the LSI to be formed, and the assignment of each of said pattern structures to a corresponding layout layer, and

wherein said database further stores a design rule file, said control section refers to said design rule file to check whether each of said plurality of layout layers meets design rules defined in said design rule file.

6. The electron beam drawing system according to claim 5 , wherein said control section assigns said pattern structures to said corresponding layout layer by specifying apexes of each of said pattern structures.

7. The electron beam drawing system according to claim 5 , wherein said extending directions are orthogonal to each other.

8. A method of manufacturing an LSI, comprising:

generating a layout data for one of physical layers of said LSI to be manufactured;

producing a mask based on said layout data; and

manufacturing said LSI by using said mask,

wherein said generating a layout data comprises:

building up a plurality of layout layers in a memory based on a layout layer definition file, wherein said plurality of layout layers are provided for extending directions of patterns in said physical layer of said LSI;

dividing each of said patterns into pattern structures based on said extending directions;

assigning each of said pattern structures to a corresponding one of said plurality of layout layers; and

generating said layout data for said physical layer by combining said plurality of layout layers,

checking whether each of said plurality of layout layers meets design rules defined in a design rule file,

wherein said building up of said plurality of layout layers comprises building up over all of the physical layers of the LSI to be formed.

9. The method according to claim 8 , wherein said assigning comprises:

assigning said pattern structures to said corresponding layout layer by specifying apexes of each of said pattern structures.

10. The method according to claim 8 , wherein said extending directions are orthogonal to each other.

11. The method according to claim 8 , wherein said generating a layout data is carried out over all of said physical layers.

12. The method according to claim 8 , wherein said producing a mask comprises:

generating an electron beam data for said physical layer; and

drawing a mask pattern based on said electron beam data to produce said mask.

13. A layout data generating method comprising:

building up a plurality of layout layers in a memory based on a layout layer definition file, wherein said plurality of layout layers are provided for extending directions of patterns in said physical layer of said LSI;

dividing each of said patterns into pattern structures based on said extending directions;

assigning each of said pattern structures to a corresponding one of said plurality of layout layers; and

generating said layout data for said physical layer by combining said plurality of layout layers,

checking whether each of said plurality of layout layers meets design rules defined in a design rule file,

wherein said building up of said plurality of layout layers comprises building up over all of the physical layers of the LSI to be formed.

14. The layout data generating method according to claim 13 , wherein said assigning comprises:

assigning said pattern structures to said corresponding layout layer by specifying apexes of each of said pattern structures.

15. The layout data generating method according to claim 13 , wherein said extending directions are orthogonal to each other.