Low temperature testing device for electronic components

1. Cold test device for electronic components, with a cryogenic fluid supply line for supply of a liquid cryogenic fluid, an evaporator for converting the liquid cryogenic fluid into a gaseous cryogenic fluid, a cryogenic fluid line for transporting the gaseous cryogenic fluid to the electronic component in order to cool the electronic component with the gaseous cryogenic fluid, and with a heating means for adjusting the temperature of the gaseous cryogenic fluid, characterized in that in the cryogenic fluid line which transports the gaseous cryogenic fluid there is a volumetric flow regulator which stabilizes the pressure and the volumetric flow of the cryogenic fluid,

wherein the volumetric flow regulator is arranged between the evaporator and the heating means.

2. Cold test device as claimed in claim 1 , wherein the volumetric flow regulator has a housing with a cryogenic fluid inlet, a cryogenic fluid outlet and a spool chamber which is located between the cryogenic fluid inlet and cryogenic fluid outlet and in which a throttle slide valve can be moved by means of the inflowing gaseous cryogenic fluid against a pretensioning force of a spring, by which the volumetric flow flowing through the volumetric flow regulator can be varied.

3. Cold test device as claimed in claim 2 , wherein the throttle slide valve comprises a slide valve sleeve which is movably located on the guide pipe which projects in the spool chamber with a radial distance to the wall of the spool chamber and which is securely connected to the housing.

4. Cold test device as claimed in claim 3 , wherein the interior of the guide pipe is fluid-connected to the cryogenic fluid outlet, in the wall of the guide pipe there being at least one through opening which is overlapped to a greater or smaller distance by the throttle slide valve depending on its position.

5. Cold test device as claimed in claim 3 , wherein the spring is located within the guide pipe and is supported with its front end on the inside of the end wall of the throttle slide valve.

6. Cold test device as claimed in claim 2 , wherein the spool chamber has a first chamber section with a larger chamber diameter which is fluid-connected to the cryogenic fluid outlet, and a second chamber section with a smaller chamber diameter which is fluid-connected to the cryogenic fluid outlet, and wherein the throttle slide valve comprises a slide valve sleeve which determines, by its relative position to the second chamber section, the volumetric flow of the cryogenic fluid from the first into the second chamber section.

7. Cold test device as claimed in claim 6 , wherein the throttle slide valve is inserted with the capacity to move into the second chamber section with narrow play and has a front valve section with a continuously peripheral outside diameter and another valve section with at least one lengthwise groove which is provided on its outside surface and which is fluid-connected to the cryogenic fluid outlet.

8. Cold test device as claimed in claim 7 , wherein the lengthwise groove deepens and/or widens to the rear so that the open groove cross section is determined by how far the throttle slide valve projects into the first chamber section.

9. Cold test device as claimed in claim 7 , wherein the throttle slide valve is open to the rear, wherein the spring is supported on the back end on the housing and projects forward into the throttle slide valve, and wherein the lengthwise groove is fluid-connected to the interior of the throttle slide valve via a passage opening in the wall of the throttle slide valve.

10. Cold test device as claimed in claim 6 , wherein the throttle slide valve between the first chamber section and the second chamber section has a conically running transition area, and wherein the throttle slide valve at least on its back end has an outside diameter which is only slightly smaller, the same size, or larger than the inside diameter of the second chamber section, and wherein the length of the throttle slide valve is shorter than the length of the first chamber section, so that the throttle slide valve can be moved between a front position, in which its back end is away from the second chamber section, and a rear position in which its back end is adjacent to the second chamber section.

11. Cold test device as claimed in claim 10 , wherein the throttle slide valve is movably guided on a guide rod which is anchored in the front part of the housing, extends through the throttle slide valve to the rear and on the back end has a stop for the spring which surrounds the guide rod.

12. Cold test device for electronic components, with a cryogenic fluid line for supply of a liquid cryogenic fluid, an evaporator for converting the liquid cryogenic fluid into a gaseous cryogenic fluid, the liquid cryogenic fluid having an associated temperature, pressure and volumetric flow, a cryogenic fluid line for transporting the gaseous cryogenic fluid to the electronic component in order to cool the electronic component with the gaseous cryogenic fluid, and with a heating means for adjusting the temperature of the gaseous cryogenic fluid, characterized in that in the cryogenic fluid line which transports the gaseous cryogenic fluid there is a volumetric flow regulator which stabilizes the pressure and the volumetric flow of the cryogenic fluid,

further including a volumetric flow regulator disposed in the cryogenic fluid line between the heating means and an end of said cryogenic fluid line.