SLM addressing methods and apparatuses

1. A method comprising:

charging at least one capacitor to a potential operable for setting at least one deflectable modulating element; and

setting the at least one deflectable modulating element to a deflection state by selectively discharging the at least one capacitor; wherein

the selective discharging is performed using one of a diode array and a diode configured to discharge the at least one capacitor.

2. The method according to claim 1 , wherein the deflection state is achieved by at least one of emitting radiation from the diode array or the diode during variable time periods and emitting radiation from the diode array or the diode with different intensities.

3. The method of claim 1 , wherein the at least one capacitor is selectively discharged to a potential by selectively impinging electromagnetic radiation onto the at least one capacitor.

4. The method according to claim 3 , wherein the electromagnetic radiation is a laser beam.

5. The method according to claim 4 , wherein the laser beam includes a plurality of beams configured to illuminate a plurality of capacitors simultaneously.

6. The method according to claim 1 , wherein the deflection state is achieved by at least one of varying the intensity of electromagnetic radiation over a period of time and varying a period of time electromagnetic radiation impinges onto the at least one capacitor.

7. A method comprising:

charging at least one capacitor to a potential operable for setting at least one deflectable modulating element;

setting the at least one deflectable modulating element to a deflection state by selectively discharging the at least one capacitor;

positioning an image on a workpiece; and

emitting electromagnetic radiation onto the at least one deflectable modulating element to create an image on the workpiece; wherein

each of the deflectable modulating elements are set to a maximum deflection state.

8. The method according to claim 7 , wherein the charging of the at least one capacitor causes the deflectable modulating element to be placed in a state between a maximum and a minimum deflection state.

9. The method according to claim 7 , further including,

impinging electromagnetic radiation onto the at least one capacitor to perform the selective discharging.

10. The method according to claim 7 , wherein the electromagnetic radiation is a laser beam.

11. The method according to claim 10 , wherein the laser beam is a multi-beam laser beam.

12. The method according to claim 10 , wherein the laser beam has a wavelength not affecting the workpiece.

13. A method comprising:

charging at least one capacitor to a potential operable for setting at least one deflectable modulating element in a spatial light modulator comprising a plurality of modulating elements and a plurality of capacitors, wherein each of said capacitors is associated with at least one electrode;

setting the at least one deflectable modulating element to a deflection state by selectively discharging the at least one capacitor, wherein said selective discharging of said at least one capacitor is performed by emitting electromagnetic radiation onto at least one electrode associated with said at least one capacitor, at least two of said deflectable modulating elements being associated with different capacitors of said plurality of capacitors, and at least one of said at least two deflectable modulating elements being individually set to a deflection state by said selective discharging of said at least one capacitor;

positioning an image on the workpiece; and

emitting electromagnetic radiation onto the at least one deflectable modulating element to create an image on the workpiece; wherein

at least two deflectable modulating elements each have a corresponding capacitor, one electrode of the at least two capacitors are coupled together.

14. The method according to claim 13 , further including,

impinging electromagnetic radiation onto the at least one capacitor to perform the selective discharging.

15. The method according to claim 13 , wherein the electromagnetic radiation is a laser beam.

16. The method according to claim 15 , wherein the laser beam is a multi-beam laser beam.

17. The method according to claim 15 , wherein the laser beam has a wavelength not affecting the workpiece.

18. A method comprising:

charging at least one capacitor to a potential operable for setting at least one deflectable modulating element;

setting the at least one deflectable modulating element to a deflection state by selectively discharging the at least one capacitor;

positioning an image on the workpiece; and

emitting electromagnetic radiation onto the at least one deflectable modulating element to create an image on a workpiece; wherein

the selective discharging is performed by a diode or an array of diodes configured to discharge the at least one a capacitor.

19. The method according to claim 18 , wherein the charging causes the at least one deflectable modulating element to be in a state between a maximum and a minimum deflection state.

20. An apparatus for patterning a workpiece, the apparatus comprising:

an electromagnetic radiation source;

a spatial light modulator having a plurality of deflectable modulating elements configured to be illuminated by the electromagnetic radiation;

a projection system configured to create an image of the spatial light modulator on a workpiece;

a positioning system configured to position at least one of the workpiece and the projection system relative to each other; wherein

the plurality of modulating elements are configured to create a number of modulating states greater than or equal to two by charging at least one capacitor,

at least of the deflectable modulating elements including the at least one capacitor chargeable with a potential operable for setting the at least one deflectable modulating element by selectively discharging the at least one capacitor to a potential, and

the discharging is performed by a diode or an array of diodes configured to discharge the at least one a capacitor.

21. The apparatus according to claim 20 , wherein the mirror element is set by at least one of varying a period of time an intensity of the electromagnetic radiation is impinged and alternating the intensity of the electromagnetic radiation impinged over a period of time.

22. The apparatus according to claim 20 , wherein the mirror element is deflected or non-deflected before selectively discharging the capacitors.

23. The apparatus according to claim 20 , wherein the corresponding capacitor is fully charged before discharging.

24. The apparatus according to claim 20 , wherein the discharging is performed by impinging electromagnetic radiation on the corresponding capacitor coupled to the electrode.

25. The apparatus according to claim 20 , wherein each of the reflecting elements has an electrode coupled to one of the plurality of capacitors and the reflecting elements are set individually by at least one of alternating the period of time over which an intensity of the electromagnetic radiation is impinged and alternating the intensity of the electromagnetic radiation impinged over a period of time.

26. The apparatus according to claim 20 , wherein the at least one reflecting element is deflected or non-deflected before selectively discharging the one of the plurality of capacitors coupled to the electrode.

27. The apparatus according to claim 20 , wherein each of the plurality of deflectable modulating elements includes a corresponding capacitor and each capacitor is charged simultaneously.

28. The apparatus according to claim 20 , wherein the at least one capacitor is fully charged.

29. The apparatus according to claim 20 , wherein the charging of the at least one capacitor causes the at least one deflectable modulating element to be placed in a state between a maximum and a minimum deflection state.

30. The apparatus according to claim 20 , wherein each of the plurality of deflectable modulating elements includes a corresponding capacitor and an electrode of each corresponding capacitor is coupled together.

31. The apparatus according to claim 20 , wherein the discharging of the at least one capacitor is performed by impinging electromagnetic radiation onto the at least one capacitor.

32. The apparatus according to claim 31 , wherein the laser beam discharging the capacitor is separate from the laser beam illuminating the plurality of deflectable modulating elements for creating the image on the workpiece.

33. The apparatus according to claim 20 , wherein the electromagnetic radiation is a laser beam.