Acoustic resonators
View Patent ↗An acoustic resonator of one inventive aspect includes a substrate, at least one generally crystalline primer layer provided on the substrate either directly or on top of one or more intermediate layers, a generally smooth and generally crystalline electrode layer provided on the primer layer, and a piezoelectric layer provided on the electrode layer. The primer layer, or at least one of the primer layers, has a crystallographic structure belonging to a first crystal system, and the electrode layer has a crystallographic structure belonging to a second crystal system which is different to the first system. The atomic spacing of the primer layer or at least one of said primer layers and that of the electrode matches to within about 15%.
1. An acoustic resonator comprising:
a substrate,
an electrode layer comprising Molybdenum or Tungsten provided directly on said substrate or indirectly on one or more intermediate layers on said substrate; and
a layer of piezoelectric material provided on said electrode layer,
wherein said electrode layer is deposited by a predominately Neon sputtering process and said electrode layer is treated with a hydrogen plasma.
2. An acoustic resonator according to claim 1 , wherein said electrode layer is formed on a primer layer of a generally crystalline form having an atomic spacing in at least one orientation which matches the atomic spacing of said electrode layer to within about 15% and is non cubic in crystalline form.