IP Library Granted Patent US 7,149,395
Granted Patent B1
US 7,149,395 · App. 11/200,307 · Granted Dec 12, 2006

Light-enhancing component and fabrication method thereof

Assignees: Instrument Technology Research Center; National Applied Research Laboratories
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Quick Facts
Patent No.
US 7,149,395
App. No.
11/200,307
Granted
Dec 12, 2006
Kind
B1
Abstract

The present invention provides a light-enhancing component and a fabrication method thereof by using the focused-ion-beam. In the present invention, the surface plasmon polariton structure is coated on the surface of the optical fiber so as to form the light-enhancing component. When the light passes through the optical fiber, the luminous flux transmitted through the aperture on the surface plasmon polariton is enhanced, and the light beam smaller than the diffraction limitation can be transmitted to the far-field, i.e. the nano-optic sword is formed. The light-enhancing component of the present invention can be used for the optical data storage, the optical microscopy, the biomedical detections and the lithography to perform the extra optical resolutions beyond the diffraction limitation.

Claims (26)

1. A light-enhancing component, comprising:

an optical fiber having a surface; and

a surface plasmon polariton structure coated on said surface of said optical fiber and having a center with a nano-aperture, said surface plasmon polariton structure having a periodic length and said nano-aperture having a size ranging from 50 nm to 400 nm for fitting an amount of the periodic length.

2. The light-enhancing component according to claim 1 , wherein said optical fiber is a waveguide made of a SiO 2 glass and a doped SiO 2 glass.

3. The light-enhancing component according to claim 1 , wherein said optical fiber is a waveguide made of a transparent polymer.

4. The light-enhancing component according to claim 1 , wherein said optical fiber is one selected from a group consisting of a single-mode optical fiber, a multi-mode optical fiber and a polarization-mode optical fiber in response to different wavelengths emitted from a light source.

5. The light-enhancing component according to claim 1 , wherein said surface is one selected from a group consisting of a flat plane, a linear-curved surface and a non-linear-curved surface.

6. The light-enhancing component according to claim 1 , wherein said surface plasmon polariton structure is made of one selected from a group consisting of Zn, Si, Ni, Sb, Ag, Ge, Al, Cu, Pt, Co, Mn, Cr, Ti, Na, Ga, As, Se, In, Sn, Te, Au, Fe and a combination thereof.

7. The light-enhancing component according to claim 6 , wherein said surface plasmon polariton structure has a thickness ranged from 100 nm to 700 nm.

8. The light-enhancing component according to claim 7 , wherein said surface plasmon polariton structure is one of a periodic structure and a periodic-like structure.

9. The light-enhancing component according to claim 8 , wherein said surface plasmon polariton structure is one of a multi-layer structure and a single-layer structure with a periodic length ranged from 100 nm to 800 nm.

10. The light-enhancing component according to claim 1 , wherein said nano-aperture fits a half of said periodic length.

11. The light-enhancing component according to claim 1 , wherein said nano-aperture has a shape being one selected from a group consisting of a polygon, an arc and a specific-curved shape.

12. A method for fabricating a light-enhancing component by using a focused-ion-beam, comprising steps of:

(a) pretreating an optical fiber;

(b) etching said optical fiber to form a naked surface of said optical surface;

(c) etching said naked surface of said optical fiber;

(d) forming said surface plasmon polariton structure; and

(e) forming a nano-aperture on said surface plasmon polariton structure, said surface plasmon polariton structure having a periodic length and said nano-aperture having a size ranging from 50 nm to 400 nm for fitting an amount of said periodic length.

13. The method according to claim 12 , wherein said optical fiber is treated to have a surface being one selected from a group consisting of a flat plane, a linear-curved surface and a non-linear-curved surface, and an electrically conductive metal film is deposited on said surface in said step (a).

14. The method according to claim 13 , wherein said optical fiber has a core, and said electrically conductive metal film is etched, so as to have an etched area bigger than said core in said step (b).

15. The method according to claim 14 , wherein said electrically conductive metal film is etched to expose said surface to be said naked surface of said optical fiber.

16. The method according to claim 14 , wherein said naked surface has an area to be etched, and said core of said optical fiber is covered by said area of said naked surface in said step (c).

17. The method according to claim 12 , wherein said surface plasmon polariton structure is made of one selected from a group consisting of Zn, Si, Ni, Sb, Ag, Ge, Al, Cu, Pt, Co, Mn, Cr, Ti, Na, Ga, As, Se, In, Sn, Te, Au, Fe and a combination thereof.

18. The method according to claim 12 , wherein said optical fiber has a core, and said core is covered by said surface plasmon polariton structure.

19. The method according to claim 12 , wherein said aperture is etched to said naked surface of said optical fiber.

Assignments (2)
CHANGE OF NAME Recorded Sep 2, 2015
From: INSTRUMENT TECHNOLOGY RESEARCH CENTER, NATIONAL APPLIED RESEARCH LABORATORIES
To: NATIONAL APPLIED RESEARCH LABORATORIES
Reel/Frame 036526/0903 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 9, 2005
From: CHEN, JYH-SHIN; FU, TONG-LONG; CHENG, SHAO-CHANG; LIN, YU-HSUAN; HU, YI-CHIUEN; LIN, HUI-HSIUNG; CHOU, HSIAO-YU
To: INSTRUMENT TECHNOLOGY RESEARCH CENTER, NATIONAL APPLIED RESEARCH LABORATORIES
Reel/Frame 016885/0188 →