Photodiode array and optical receiver device including the same
Disclosed is a photodiode array which includes a plurality of p-i-n photodiodes arrayed on a semi-insulative semiconductor substrate, each photodiode including an n-type semiconductor layer grown on the substrate, an i-type semiconductor layer grown on the n-type semiconductor layer, a p-type semiconductor layer grown on the i-type semiconductor layer, an n-type electrode provided on the n-type semiconductor layer in a region exposed by partially removing the p-type semiconductor layer and the i-type semiconductor layer, and a p-type electrode provided on the p-type semiconductor layer. A trench is provided between the two adjacent photodiodes by partially removing the p-type semiconductor layer, the i-type semiconductor layer, and the n-type semiconductor layer. Consequently, the size and pitch of the photodiodes can be decreased and crosstalk between the photodiodes can be reduced. Also disclosed is an optical receiver device including the photodiode array.
1. A photodiode array comprising a plurality of p-i-n photodiodes arrayed on a substrate, each photodiode comprising:
a semi-insulative semiconductor substrate comprising Fe-doped indium phosphide;
a p-type semiconductor layer on the semi-insulative semiconductor substrate;
an i-type semiconductor layer on the p-type semiconductor layer;
an n-type semiconductor layer on the i-type semiconductor layer;
a p-type electrode provided on the p-type semiconductor layer; and
an n-type electrode provided on the n-type semiconductor layer,
wherein a trench is provided between two adjacent photodiodes, and
wherein the photodiode array is configured so that light incident on the p-i-n photodiodes enters from the semiconductor substrate side.
2. A photodiode array according to claim 1 , wherein the trench extends to the semi-insulative semiconductor substrate.
3. A photodiode array according to claim 1 , wherein the trench is filled with a resin which does not transmit received light.
4. A photodiode array according to claim 1 , wherein the p-type semiconductor layer comprises indium phosphide.
5. A photodiode array according to claim 1 , wherein the i-type semiconductor layer comprises indium gallium arsenide.
6. A photodiode array according to claim 1 , wherein the n-type semiconductor layer comprises indium phosphide.