Capacitor having a dielectric layer that reduces leakage current and a method of manufacturing the same
A capacitor having a dielectric layer including a composite oxide, the composite oxide including a transition metal and including a lanthanide group element, a memory device including the same and a method of manufacturing the capacitor are provided. The transition metal may be titanium and the composite oxide may be nitrided. The method may include providing a precursor of a transition metal, providing a precursor of a lanthanide group element, and forming a composite oxide on the lower electrode by oxidizing both the precursor of the transition metal and the precursor of the lanthanide group element, the composite oxide containing the transition metal and the lanthanide group element.
1. A capacitor, comprising:
a lower electrode on a semiconductor substrate;
a dielectric layer on the lower electrode; and
an upper electrode on the dielectric layer,
wherein the dielectric layer includes a composite oxide, the composite oxide consisting of an oxygen, a transition metal, and a lanthanide group element, the lanthanide group element (L) being present in the composite oxide at an atomic ratio ranging from about 70T:30L to about 40T:60L with respect to the transition metal (T).
2. The capacitor as claimed in claim 1 , wherein the lanthanide group element is at least one selected from the group consisting of lanthanum, cerium, praseodymium, neodymium, promethium, samarium, europium, gadolinium, terbium, dysprosium, holmium, erbium, thulium, ytterbium, and lutetium.
3. The capacitor as claimed in claim 1 , wherein the transition metal is Ti.
4. The capacitor as claimed in claim 1 , wherein the lower electrode and the upper electrode both comprise ruthenium.
5. The capacitor as claimed in claim 1 , wherein the dielectric layer is in an amorphous state.
6. The capacitor as claimed in claim 1 , wherein the dielectric layer includes dysprosium titanate.
7. The capacitor as claimed in claim 1 , wherein the dielectric layer consists of the composite oxide.
8. A capacitor, comprising:
a lower electrode on a semiconductor substrate;
a dielectric layer on the lower electrode; and
an upper electrode on the dielectric layer,
wherein the dielectric layer is a nitride of a composite oxide, the composite oxide including a transition metal and a lanthanide group element.
9. The capacitor as claimed in claim 8 , wherein the dielectric layer comprises LnTiON, where Ln is at least one selected from the group consisting of lanthanum, cerium, praseodymium, neodymium, promethium, samarium, europium, gadolinium, terbium, dysprosium, holmium, erbium, thulium, ytterbium, and lutetium.
10. A semiconductor memory device, comprising;
a semiconductor substrate having first and second dopant regions; a gate structure formed between the first and second dopant regions; and a capacitor electrically connected to the second dopant region, the capacitor including:
a lower electrode;
a dielectric layer on the lower electrode; and
an upper electrode on the dielectric layer,
wherein the dielectric layer includes a composite oxide, the composite oxide consisting of an oxygen, a transition metal, and a lanthanide group element, the lanthanide group element (L) being present in the composite oxide at an atomic ratio ranging from about 70T:30L to about 40T:60L with respect to the transition metal (T).
11. The semiconductor memory device as claimed in claim 10 , wherein the lanthanide group element is at least one selected from the group consisting of lanthanum, cerium, praseodymium, neodymium, promethium, samarium, europium, gadolinium, terbium, dysprosium, holmium, erbium, thulium, ytterbium, and lutetium.
12. The semiconductor memory device as claimed in claim 10 , wherein the transition metal is Ti.
13. The semiconductor memory device as claimed in claim 10 , wherein the dielectric layer is in an amorphous state.
14. The semiconductor memory device as claimed in claim 10 , wherein the dielectric layer includes dysprosium titanate.
15. The semiconductor memory device as claimed in claim 10 , wherein the dielectric layer consists of the composite oxide.
16. A semiconductor memory device, comprising:
a semiconductor substrate having first and second dopant regions; a gate structure formed between the first and second dopant regions; and a capacitor electrically connected to the second dopant region, the capacitor including:
a lower electrode;
a dielectric layer on the lower electrode; and
an upper electrode on the dielectric layer,
wherein the dielectric layer is a nitride of a composite oxide, the composite oxide including a transition metal and a lanthanide group element.
17. The semiconductor memory device as claimed in claim 16 , wherein the dielectric layer comprises LnTiON, where Ln is at least one selected from the group consisting of lanthanum, cerium, praseodymium, neodymium, promethium, samarium, europium, gadolinium, terbium, dysprosium, holmium, erbium, thulium, ytterbium, and lutetium.
18. A capacitor, comprising:
a lower electrode on a semiconductor substrate;
a dielectric layer on the lower electrode; and
an upper electrode on the dielectric layer,
wherein the dielectric layer includes a composite oxide consisting of an oxygen, a titanium, and a lanthanide group.
19. The capacitor as claimed in claim 18 , wherein the dielectric layer includes Ln 2 O 3 and TiO 2 .
20. A method of manufacturing a capacitor, comprising:
forming a lower electrode;
forming a dielectric layer on the lower electrode; and
forming an upper electrode on the dielectric layer, wherein forming the dielectric layer includes forming a composite oxide consisting of an oxygen, a transition metal, and a lanthanide group element on the lower electrode, the lathanide group element (L) being present in the composite oxide at an atomic ratio ranging from about 70T:30L to about 40T:60L with respect to the transition metal(T).
21. The method as claimed in claim 20 , wherein forming the composite oxide comprises:
inputting a precursor of the transition metal and a precursor of the lanthanide group material into a reaction chamber;
forming a precursor composite layer of the precursor of the transition metal and the precursor of the lanthanide group material on the lower electrode; and
oxidizing the precursor composite layer formed of the precursor of the transition metal and the precursor of the lanthanide group material.
22. The method as claimed in claim 21 wherein oxidizing the precursor composite layer comprises;
discharging the precursor of the transition metal and the precursor of the lanthanide group material, which remain unreacted in the reaction chamber, to the outside of the reaction chamber; and
oxidizing the precursor composite layer of the precursor of the transition metal and the precursor of the lanthanide group material by injecting a material containing oxygen into the reaction chamber.
23. The method as claimed in claim 21 , wherein the precursor of the lanthanide group element includes at least one material selected from the group consisting of Ln(TMHD) 3 and Ln(i-PrCp) 3 , where Ln is at least one selected from the group consisting of lanthanum, cerium, praseodymium, neodymium, promethium, samarium, europium, gadolinium, terbium, dysprosium, holmium, erbium, thulium, ytterbium, and lutetium.
24. The method as claimed in claim 21 , wherein the precursor of the transition metal includes at least one material selected from the group consisting of Ti(i-OPr)2(TMHD) 2 , Ti(i-OPr) 4 , and Ti(DMPD)(TMIID) 2 .
25. The method as claimed in claim 21 further comprising nitriding the oxidized precursor composite layer.
26. The method as claimed in claim 25 wherein the nitrided oxidized precursor composite layer comprises LnTiON, where Ln is at least one selected from the group consisting of lanthanum, cerium, praseodymium, neodymium, promethium, samarium, europium, gadolinium, terbium, dysprosium, holmium, erbium, thulium, ytterbium, and lutetium.
27. The method as claimed in claim 21 wherein the precursor of the transition metal and the precursor of the lanthanide group element are provided into a reaction chamber at the same time, and wherein the precursor of the transition metal and the precursor of the lanthanide group element are oxidized together.
28. The method as claimed in claim 21 , wherein the precursor of the transition metal and the precursor of the lanthanide group element are provided into a reaction chamber sequentially, and wherein the precursor of the transition metal and the precursor of the lanthanide group element are oxidized together.
29. A method of manufacturing a capacitor, comprising:
forming a lower electrode on a semiconductor substrate;
forming a dielectric layer on the lower electrode; and
forming an upper electrode on the dielectric layer, wherein forming the dielectric layer includes forming a nitride of a composite oxide having a transition metal and a lanthanide group.
30. The method as claimed in claim 18 , wherein forming the nitride of the composite oxide includes forming a dielectric layer having a structure of LnTiON, Ln being at least one selected from the group consisting of lanthanum, cerium, praseodymium, neodymium, promethium, samarium, europium, gadolinium, terbium, dysprosium, holmium, erbium, thulium, ytterbium, and lutetium.