Method of manufacturing semiconductor device

1. A method of manufacturing a semiconductor device, comprising:

forming an interlayer insulating film on a conductive portion formed in a semiconductor substrate which is placed in a chamber;

forming a contact hole to pass through said interlayer insulating film to said conductive portion;

forming a barrier metal layer to cover a bottom portion and side wall portion of said contact hole;

forming a tungsten layer from a material gas containing fluorine to fill said contact hole in which said barrier metal layer has been formed; and

removing said fluorine from said tungsten layer through a post purge process,

wherein said forming a tungsten layer comprises:

introducing an inert gas into said chamber for a first gas purge;

introducing a hydrogen gas and a silicon hydride gas into said chamber for a second gas purge after said first gas purge;

forming a first tungsten layer of said tungsten layer from a tungsten fluoride gas after said second gas purge;

introducing said hydrogen gas and said inert gas into said chamber for a third gas purge after said first tungsten layer is formed; and

forming a second tungsten layer of said tungsten layer on said first tungsten layer from said tungsten fluoride gas after said third gas purge,

wherein said removing comprises:

introducing said hydrogen gas and said inert gas into said chamber for a fourth gas purge;

introducing said hydrogen gas and said silicon hydride gas into said chamber for said post purge process to form a silicon layer on said tungsten layer such that silicon in said silicon layer reacts with fluorine in said tungsten layer to form a silicon fluoride layer, after said fourth gas purge;

introducing said hydrogen gas and said inert gas into said chamber for a fifth gas purge; and

removing said silicon fluoride layer after said fifth gas purge.

2. The method according to claim 1 , wherein said forming a first tungsten layer comprises:

introducing said silicon hydride gas and said tungsten fluoride gas into said chamber, and

said forming a second tungsten layer comprises:

introducing said hydrogen gas and said tungsten fluoride gas into said chamber.

3. A method of manufacturing a semiconductor device, comprising:

forming an interlayer insulating film on a conductive portion formed in a semiconductor substrate which is placed in a chamber;

forming a contact hole to pass through said interlayer insulating film to said conductive portion;

forming a barrier metal layer to cover a bottom portion and side wall portion of said contact hole;

forming a tungsten layer from a material gas containing fluorine to fill said contact hole in which said barrier metal layer has been formed; and

removing said fluorine from said tungsten layer through a post purge process, wherein said removing comprises:

introducing a hydrogen gas and an inert gas into said chamber for a first gas purge;

introducing a hydrogen gas and a silicon hydride gas into said chamber for said post purge process to form a silicon layer on said tungsten layer such that silicon in said silicon layer reacts with fluorine in said tungsten layer to form a silicon fluoride layer, after said first gas purge;

introducing said hydrogen gas and said inert gas into said chamber for a second gas purge; and

removing said silicon fluoride layer after said second gas purge.

4. The method according to claim 1 , wherein a temperature of said semiconductor substrate in said post purge process is in a range from 250° C. to 500° C.

5. The method according to claim 1 , wherein a gas pressure of said silicon hydride gas in said post purge process is in a range from 0.1 torr to 3 torr.

6. The method according to claim 1 , wherein a process time of said post purge process is in a range from 3 seconds to 20 seconds.

7. The method according to claim 1 , wherein said silicon hydride gas is a monosilane (SiH 4 ) gas or a disilane (Si 2 H 6 ) gas.

8. The method according to claim 1 , wherein said tungsten fluoride gas is a tungsten hexafluoride (WF 6 ) gas.

9. The method according to claim 1 , wherein said inert gas is any of a helium gas, a neon gas, an argon gas, a krypton gas, a xenon gas and a radon gas.

10. The method according to claim 3 , wherein a temperature of said semiconductor substrate in said post purge process is in a range from 250° C. to 500° C.

11. The method according to claim 3 , wherein a gas pressure of said silicon hydride gas in said post purge process is in a range from 0.1 torr to 3 torr.

12. The method according to claim 3 , wherein a process time of said post purge process is in a range from 3 seconds to 20 seconds.

13. The method according to claim 3 , wherein said silicon hydride gas is a monosilane (SiH 4 ) gas or a disilane (Si 2 H 6 ) gas.

14. The method according to claim 3 , wherein said tungsten fluoride gas is a tungsten hexafluoride (WF 6 ) gas.

15. The method according to claim 3 , wherein said inert gas is any of a helium gas, a neon gas, an argon gas, a krypton gas, a xenon gas and a radon gas.

16. A method of manufacturing a semiconductor device, comprising:

forming an interlayer insulating film on a conductive portion formed in a semiconductor substrate which is placed in a chamber;

forming a contact hole to pass through said interlayer insulating film to said conductive portion;

forming a barrier metal layer to cover a bottom portion and side wall portion of said contact hole;

forming a tungsten layer from a material gas containing fluorine to fill said contact hole in which said barrier metal layer has been formed; and

removing said fluorine from said tungsten layer by introducing a hydrogen gas and a silicon hydride gas into said chamber to form a silicon layer on said tungsten layer such that silicon in said silicon layer reacts with fluorine in said tungsten layer to form a silicon fluoride layer.