Electronic device manufacturing chamber method
A non-polygon shaped, multi-piece chamber is provided. A non-polygon shaped, multi-piece chamber may include (1) a central piece having a first side and a second side, (2) a first side piece adapted to couple with the first side of the central piece, and (3) a second side piece adapted to couple with the second side of the central piece. The central piece, the first side piece, and the second side piece form a cylindrical overall shape when coupled together. Numerous other aspects are provided.
1. A method comprising:
transporting a plurality of separate chamber pieces that are adapted to fit together to form a non-polygon shaped transfer chamber, the separate chamber pieces including a plurality of recessed facets, each recessed facet being adapted to be a coupling point to another chamber and including at least one opening; and
assembling the separate chamber pieces into the non-polygon shaped transfer chamber,
wherein the non-polygon shaped transfer chamber is an electronic device transfer chamber used in the manufacture of electronic devices.
2. The method of claim 1 further comprising coupling a plurality of processing chambers to the non-polygon shaped transfer chamber via the recessed facets.
3. The method of claim 1 further comprising installing extended facets into the recessed facets.
4. The method of claim 3 further comprising coupling a plurality of processing chambers to the non-polygon shaped transfer chamber via the extended facets.
5. The method of claim 1 further comprising installing a robot within the non-polygon shaped transfer chamber, the robot being adapted to pass a substrate between processing chambers coupled to the non-polygon shaped transfer chamber.
6. A method comprising:
transporting a plurality of separate chamber pieces that are adapted to fit together to form a non-polygon shaped transfer chamber, the separate chamber pieces including a plurality of recessed facets, each recessed facet being adapted to be a coupling point to another chamber and including at least one opening;
assembling the separate chamber pieces into the non-polygon shaped transfer chamber; and
coupling a plurality of processing chambers to the non-polygon shaped transfer chamber.
7. The method of claim 6 wherein the plurality of processing chambers are coupled to the non-polygon shaped transfer chamber via the recessed facets.
8. The method of claim 6 further comprising installing extended facets into the recessed facets.
9. The method of claim 8 wherein the plurality of processing chambers are coupled to the non-polygon shaped transfer chamber via the extended facets.
10. A method comprising:
transporting a plurality of separate chamber pieces that are adapted to fit together to form a non-polygon shaped transfer chamber, the separate chamber pieces including a plurality of recessed facets, each recessed facet being adapted to be a coupling point to another chamber and including at least one opening;
assembling the separate chamber pieces into the non-polygon shaped transfer chamber; and
installing a robot within the non-polygon shaped transfer chamber, the robot being adapted to pass a substrate between processing chambers coupled to the non-polygon shaped transfer chamber.