Apparatus and method for detecting scattered material by terahertz wave
View Patent ↗There is disclosed an apparatus comprising: a terahertz wave generation device which generates a terahertz wave; a terahertz wave irradiation device which irradiates an object to be inspected with the terahertz wave; and a scattering intensity detection device which cuts a rectilinear wave of the terahertz wave which has passed through the object to be inspected and which detects an intensity of a scattered wave, and a scattered material such as powder or foam contained in an envelope, a capsule, a container or the like is detected in a non-destructive manner without unsealing the envelope or the like.
1. A scattered material detection apparatus using a terahertz wave, comprising:
(a) terahertz wave generation device which generates the terahertz wave;
(b) a terahertz wave irradiation device which irradiates an object to be inspected with the terahertz wave, wherein the terahertz wave irradiation device comprises
i. a lens that converts the generated terahertz wave into parallel light; and
ii. an iris diaphragm that limits a sectional shape of the parallel light to be smaller than that of the object to be inspected to irradiate the object with light; and
(c) a scattering intensity detection device for cutting a rectilinear wave of the terahertz wave which has passed through the object to be inspected and for detecting an intensity of a scattered wave, wherein the scattering intensity detection device comprises
i. a confocal optical system for interrupting the terahertz wave that has rectilinearly passed through the object to be inspected midway and for focusing the terahertz wave scattered by the object to be inspected in a predetermined position; and
ii. a scattering intensity detection unit that detects the intensity of the terahertz wave in the focal position.
2. The scattered material detection apparatus according to claim 1 , wherein the confocal optical system comprises: first and second off-axis parabolic mirrors which face each other; and a shielding member which is positioned between the two off-axis parabolic mirrors and which cuts the rectilinear wave of the terahertz wave and which transmits the scattered wave,
the first off-axis parabolic mirror has an incidence-side focus and a reflection-side focus along an axial line of the terahertz wave,
the object to be inspected is positioned in the incidence-side focus of the first off-axis parabolic mirror or in the vicinity of the incidence-side focus, and
the shielding member is positioned in the reflection-side focus of the first off-axis parabolic mirror or in the vicinity of the reflection-side focus.
3. The scattered material detection apparatus according to claim 2 , wherein the terahertz wave generation device comprises a linear light source and the lens is a cylindrical lens that extends in parallel with the object.
4. The scattered material detection apparatus according to claim 1 , wherein the confocal optical system comprises: first and second convex lenses which face each other; and a shielding member which is positioned between two convex lenses and which cuts the rectilinear wave of the terahertz wave and which transmits the scattered wave,
the first convex lens has an incidence-side focus and an outlet-side focus along an axial line of the terahertz wave,
the object to be inspected is positioned in the incidence-side focus of the first convex lens or in the vicinity of the incidence-side focus, and
the shielding member is positioned in the outlet-side focus of the first convex lens or in the vicinity of the outlet-side focus.
5. The scattered material detection apparatus according to claim 4 , wherein the terahertz wave generation device comprises a linear light source and the lens is a cylindrical lens that extends in parallel with the object.
6. The scattered material detection apparatus according to claim 1 , wherein the terahertz wave generation device comprises a linear light source and the lens is a cylindrical lens that extends in parallel with the object.
7. A scattered material detection method using a terahertz wave, comprising:
a terahertz wave generating step of generating the terahertz wave;
a terahertz wave irradiating step of irradiating an object to be inspected with the terahertz wave; and
a scattering intensity detecting step of cutting a rectilinear wave of the terahertz wave which has passed through the object to be inspected and detecting an intensity of a scattered wave, wherein in the terahertz wave irradiating step, the terahertz wave generated in the terahertz wave generating step is converted into parallel light, and a sectional shape of the parallel light is limited by an iris diaphragm to be smaller than that of the object to be inspected to irradiate the object with the light, and
in the scattering intensity detecting step, the terahertz wave which has rectilinearly passed through the object to be inspected is interrupted midway, the terahertz wave scattered by the object to be inspected is focused in a predetermined position, and the intensity of the terahertz wave in the focal position is detected.
8. A scattered material detection method using a terahertz wave, comprising the steps of:
(a) generating a terahertz wave;
(b) irradiating an object to be inspected with the terahertz wave; and
(c) cutting a rectilinear wave of the terahertz wave that has passed through the object to be inspected and detecting an intensity of a scattered wave, wherein when irradiating the object to be inspected the terahertz wave is converted into parallel light, and a sectional shape of the parallel light is limited by an iris diaphragm to be smaller than that of the object to be inspected to irradiate the object with the light, and
the terahertz wave that has rectilinearly passed through the object to be inspected is interrupted midway, and the terahertz wave scattered by the object to be inspected is focused in a predetermined position so that intensity of the terahertz wave in the focal position is detected.