Method for monitoring micro-lens curvature in-line
View Patent ↗A method and system for monitoring a curvature of a micro-lens in-line is disclosed. According to embodiments, sizes of circles (or circle images) from a top view of a micro-lens are measured and correlated to a change in focus depth of an optical scope. A method in accordance with embodiments can include the steps of: (i) measuring a diameter or area of a circle in the micro-lens when focusing a scope on a top point of the micro-lens; (ii) measuring a diameter or area of one or more second circles in the micro-lens by focusing the scope on one or more points lower than the top point of the micro-lens in stages, each stage correlated to changing a depth of focus of the scope; and (iii) calculating the curvature of the micro-lens with each diameter or area of the measured circles.
1. A method for in-line monitoring a curvature of a micro-lens of a CMOS image sensor, comprising:
measuring a first diameter or area of a first circle in the micro-lens by focusing a scope substantially on a top point of the micro-lens on the CMOS image sensor;
measuring a second diameter or area of a second circle in the micro-lens by focusing the scope on a point lower than the top point of the micro-lens;
using in-line monitoring equipment, plotting a graph depicting the first and second diameters or areas of the measured circles as a function of a depth of focus of the scope; and
calculating the curvature of the micro-lens using the plotted graph.
2. The method of claim 1 , wherein focusing the scope on the lower point comprises changing a depth of focus of the scope.
3. The method of claim 1 , wherein the changed depth of focus is within a thickness range of the micro-lens.
4. The method of claim 1 , wherein the first and second circles are seen from a top view.
5. The method of claim 1 , wherein the first and second circles each have a difference of contrast from a larger circle corresponding to a diameter of the micro-lens.
6. The method of claim 1 , further comprising the step of measuring a third diameter or area of a third circle in the micro-lens by focusing a scope on a third point of the micro-lens other than the top point and the lower point, and plotting the graph further depicts the third diameter or area.
7. The method of claim 1 , comprising:
measuring the first diameter of the first circle;
measuring the second diameter of the second circle; and
plotting the graph using the first and second diameters of the measured circles.
8. The method of claim 7 , further comprising the step of measuring a third diameter of a third circle in the micro-lens by focusing a scope on a third point of the micro-lens other than the top point and the lower point, and plotting the graph further uses the third diameter.
9. The method of claim 1 , wherein the graph comprises a three-dimensional graph.
10. A computer-readable medium containing a set of instructions adapted to perform the method of claim 1 .
11. The medium of claim 10 , further comprising one or more instructions adapted to measure a third diameter or area of a third circle in the micro-lens by focusing a scope on third point other than the top point and the lower point.
12. The medium of claim 11 , further comprising one or more instructions adapted to calculate the curvature of the micro-lens further using the third diameter or area.
13. The method of claim 1 , further comprising, after calculating the curvature of the micro-lens, repeating the method on another microlens.
14. A system configured for calculating a curvature of a micro-lens of a CMOS image sensor, comprising:
a scope configured to focus light at a plurality of depths into the micro-Jens on the CMOS image sensor;
a contrast measuring device configured to measure or determine a diameter or area of a plurality of circles corresponding to the plurality of depths of the focused light;
equipment for plotting a graph depicting the first and second diameters or areas of the measured circles as a function of a depth of focus of the scope; and
a calculating device configured to calculate the curvature of the micro-lens using the plotted graph.
15. The system of claim 14 , wherein the plurality of depths includes a top point of the micro-lens and another point lower than the top point.
16. The system of claim 15 , wherein the plurality of depths includes a third point of the micro-lens other than the top point and the lower point.
17. The system of claim 14 , wherein the plurality of circles comprise a plurality of contrast circles.
18. The system of claim 14 , wherein the contrast measuring device includes a laser.
19. The system of claim 14 , configured for use in an a CMOS image sensor production flow.