Surface acoustic wave device and method for fabricating the same
View Patent ↗A novel surface acoustic wave device with a decreased velocity dispersion and a low insertion loss as well as the fabrication method therefor is provided. The surface acoustic wave device includes a substrate, an insulating layer with an indentation on the substrate, a silicon layer with a first portion on the insulating layer and a second portion suspended above the indentation, a piezoelectric layer on the first and the second portions of the silicon layer, and at least an electrode on the piezoelectric layer.
1. A surface acoustic wave device comprising:
a substrate;
an insulating layer with an indentation on said substrate, wherein said indentation passes through said insulating layer without passing through said substrate;
a silicon layer with a first portion on said insulating layer and a second portion suspended above said indentation;
a piezoelectric layer having third and fourth portions on said first and said second portions of said silicon layer, respectively; and
at least a metallic and interdigital-shaped electrode having a fifth portion and a sixth portion on said third portion and said fourth portion, respectively, wherein said first portion, said third portion and said fifth portion are separated from said second portion, said fourth portion and said sixth portion by an etch window for suspending said second portion, said fourth portion and said sixth portion of said metallic and interdigital-shaped electrode sequentially disposed above said indentation.
2. The surface acoustic wave device according to claim 1 , wherein said substrate is a silicon substrate.
3. The surface acoustic wave device according to claim 1 , wherein said insulating layer is a silica layer.