Semiconductor device and method for manufacturing same
View Patent ↗A technology for inhibiting the dielectric breakdown occurred in a semiconductor device is provided. A semiconductor device includes a semiconductor substrate (not shown), an interlayer insulating film 102 formed on the semiconductor substrate and a multiple-layered insulating film 140 provided on the interlayer insulating film 102 . The semiconductor device also includes an electric conductor that extends through the multiplelayered insulating film 140 and includes a Cu film 120 and a barrier metal film 118 . The barrier metal film 118 is covers side surfaces and a bottom surface of the Cu film 120 . An insulating film 116 is disposed between the multiple-layered insulating film 140 and the electric conductor (i.e., Cu film 120 and barrier metal film 118 ).
1. A semiconductor device, comprising:
a semiconductor substrate;
a multiple-layered insulating film provided on an upper portion of said semiconductor substrate;
an electric conductor containing copper or copper alloy, said electric conductor being provided so as to extend through said multiple-layered insulating film; and
an insulating film provided between said multiple-layered insulating film and said electric conductor,
wherein said multiplelayered insulating film includes a first insulating layer, a second insulating layer and a third insulating layer, said second insulating layer being provided on said first insulating layer and having lower dielectric constant than the dielectric constant of said first insulating layer, said third insulating layer being provided on said second insulating layer and having higher dielectric constant than the dielectric constant of said second insulating layer, and
wherein said insulating film provides an isolation of said electric conductor from an interface between said first insulating layer and said second insulating layer, and provides an isolation of said electric conductor from an interface between said second insulating layer and said third insulating layer.
2. The semiconductor device according to claim 1 , wherein a relationship of said insulating film with said multiple-layered insulating film is provided so that said insulating film extends through said second insulating, layer and said third insulating layer to be embedded within at least a portion of said first insulating layer.
3. The semiconductor device according to claim 1 , wherein said insulating film extends through said multiplelayered insulating film.
4. The semiconductor device according to claim 1 , wherein a film thickness of said insulating film in vicinity of the interface between said first insulating layer and said second insulating layer is larger than a film thickness of said insulating film in vicinity of the interface between said second insulating layer and between said third insulating layer.
5. The semiconductor device according to claim 4 , wherein the film thickness of said insulating film is gradually reduced as a distance from a bottom of said multiple-layered insulating film is increased.
6. The semiconductor device according to claim 1 , wherein said insulating film contains a material that is similar type to the material of said first insulating layer.
7. The semiconductor device according to claim 1 , wherein a specific dielectric constant of said second insulating layer is equal to or less than 3.5.
8. The semiconductor device according to claim 1 , wherein said electric conductor includes a layer of copper or copper alloy, and a barrier metal film that covers a bottom surface and a side surface of said layer of copper or copper alloy.
9. The semiconductor device according to claim 1 , further comprising a fourth insulating layer that is provided on said multiple-layered insulating film.
10. The semiconductor device according to claim 9 , wherein said insulating film contains a material that is similar type to the material of said first insulating layer and said fourth insulating layer, and is formed so as to contact with said first insulating layer and said fourth insulating layer.
11. The semiconductor device according to claim 1 , wherein an interconnect is provided in said multiple-layered insulating film, and said electric conductor composes at least a portion of said interconnect.
12. The semiconductor device according to claim 1 , further comprising an interconnect that is provided between said semiconductor substrate and said multiple-layered insulating film, and said electric conductor composes at least a portion of a via plug that is coupled to said interconnect.