Adjusted frequency temperature coefficient resonator
View Patent ↗A temperature compensated pair of resonators. The temperature compensated pair of resonators comprises a first resonator configured to resonate at a first frequency and having a first frequency temperature coefficient and a second resonator configured to resonate at a second frequency and having a second frequency temperature coefficient. The second frequency is greater than the first frequency; the second frequency temperature coefficient is less than the first frequency temperature coefficient; and the first and the second resonators are fabricated on a common substrate.
1. A temperature compensated pair of resonators, comprising:
a first resonator comprising: a first bottom electrode; a first piezoelectric structure comprising a first piezoelectric layer, a second piezoelectric layer and an interstitial layer disposed between, and in contact with both the first piezoelectric layer and the second piezoelectric layer, wherein the interstitial layer comprises a stiffness coefficient versus temperature that is greater than a stiffness coefficient versus temperature of either of the first piezoelectric layer or the second piezoelectric layer; a mass load layer disposed beneath the first bottom electrode; and a first top electrode, wherein the first resonator has a first resonant frequency; and
a second resonator comprising a second bottom electrode; a second piezoelectric structure; and a second top electrode, wherein the second resonator has a second resonant frequency and a temperature coefficient of the stiffness of the mass load layer differs from a temperature coefficient of stiffness of the second top electrode.
2. The temperature compensated pair of resonators as recited in claim 1 , wherein the mass load layer is an organic material.
3. The temperature compensated pair of resonators as recited in claim 2 , wherein the organic material is selected from the group consisting of PMMA (Polymethyl-methacrylate), PY (Polyimides), and BCB (Benzocyclobutene).
4. The temperature compensated pair of resonators as recited in claim 1 , wherein the mass load layer is a resin.
5. The temperature compensated pair of resonators as recited in claim 4 , wherein the resin is a low-k material.
6. The temperature compensated pair of resonators as recited in claim 1 , wherein the mass load layer is an oxide.
7. A temperature compensated pair of resonators, comprising:
a first resonator comprising: a first bottom electrode; a first piezoelectric structure comprising a first piezoelectric layer, a second piezoelectric layer and an interstitial layer disposed between, and in contact with both the first piezoelectric layer and the second piezoelectric layer, wherein the interstitial layer comprises a stiffness coefficient versus temperature that is greater than a stiffness coefficient verse temperature of either of the first piezoelectric layer or the second piezoelectric layer; a mass load layer disposed beneath the first bottom electrode; a first top electrode; and another mass load layer disposed over the first top electrode, wherein the first resonator has a first resonant frequency; and
a second resonator comprising: a second bottom electrode; a second piezoelectric structure; and a second top electrode, wherein the second resonator has a second resonant frequency and a temperature coefficient of the stiffness of the mass load layer disposed beneath the first bottom electrode differs from a temperature coefficient of stiffness of the second bottom electrode.
8. The temperature compensated pair of resonators as recited in claim 7 , wherein the mass load layer is an organic material.
9. The temperature compensated pair of resonators as recited in claim 8 , wherein the organic material is selected from the group consisting of PMMA (Polymethyl-methacrylate), PY (Polyimides), and BCB (Benzocyclobutene).
10. The temperature compensated pair of resonators as recited in claim 7 , wherein the mass load layer is a resin.
11. The temperature compensated pair of resonators as recited in claim 10 , wherein the resin is a low-k material.
12. The temperature compensated pair of resonators as recited in claim 7 , wherein the mass load layer is an oxide.