CMOS image sensor and method for fabricating the same
View Patent ↗A CMOS image sensor and a method for fabricating the same are disclosed, in which the fabrication costs are reduced by reducing the number of photolithographic processes and yield is improved by obviating an alignment problem between color filter layers and microlenses. In one embodiment, the CMOS image sensor includes a sub layer provided with a unit pixel (e.g., a photodiode and various transistors), a planarization layer on the sub layer, and microlens-color filter structures formed on the planarization layer at constant intervals.
1. A CMOS image sensor comprising:
a sub layer comprising a plurality of photodiodes and a plurality of transistors;
a planarization layer on the sub layer; and
microlens-color filter structures on the planarization layer, spaced at substantially constant intervals, wherein each of the microlens-color filter structures comprises a convex photoresist material that converges light onto a corresponding photodiode of the plurality of photodiodes and that has light wavelength absorption/transmission characteristics to serve as a color filter.
2. The CMOS image sensor according to claim 1 , wherein the microlens-color filter structures have a thickness of 1 μm to 5 μm.
3. The CMOS image sensor according to claim 1 , wherein the plurality of transistors comprises a reset transistor, a drive transistor and a selection transistor.
4. The CMOS image sensor according to claim 1 , wherein the microlens-color filter structures comprise red, blue, and green color filters.
5. The CMOS image sensor according to claim 1 , wherein the microlens-color filter structures comprise yellow, magenta, and cyan color filters.
6. A method for fabricating a CMOS image sensor comprising:
forming a planarization layer on a surface of a sub layer comprising a plurality of photodiodes and a plurality of transistors;
forming a plurality of color filter layers on the planarization layer at constant intervals, each color filter layer comprising a photoresist material having light wavelength absorption/transmission characteristics that serve to filter light; and
reflowing the color filter layers to form convex microlens-color filter structures, each of which converges light onto a corresponding photodiode of the plurality of photodiodes.
7. The method according to claim 6 , wherein reflowing is performed at a temperature of from 100° C. to 250° C.
8. The method according to claim 6 , wherein reflowing is performed at a temperature of from 150° C. to 200° C.
9. The method according to claim 6 , wherein the microlens-color filter structures have a thickness of 1 μm to 5 μm.
10. The method according to claim 6 , wherein the planarization layer comprises one of a nitride layer and an oxide layer.
11. The method according to claim 6 , further comprising forming a color filter patterning layer prior to forming the plurality of color filters.
12. The method according to claim 11 , further comprising removing the color filter patterning layer after fanning the plurality of color filters.
13. A CMOS image sensor comprising:
a substrate comprising an array of photosensors and CMOS logic;
a planarization layer on the substrate; and
a plurality of unitary microlens-color filter structures on the planarization layer, wherein each of the microlens-color filter structures comprises a convex photoresist material that converges light onto a corresponding photodiode and that has light wavelength absorption/transmission characteristics to serve as a color filter.
14. The CMOS image sensor according to claim 13 , wherein the microlens-color filter structures have a thickness of 1 μm to 5 μm.
15. The CMOS image sensor according to claim 13 , wherein each of the photosensors comprise a photodiode.
16. The CMOS image sensor according to claim 13 , wherein the CMOS logic comprises a plurality of transistors.
17. The CMOS image sensor according to claim 16 , wherein the plurality of transistors comprises a reset transistor, a drive transistor and a selection transistor.
18. The CMOS image sensor according to claim 13 , wherein the microlens-color filter structures comprise red, blue, and green color filters, or yellow, magenta, and cyan color filters.
19. The CMOS image sensor according to claim 1 , wherein each microlens-color filter structure consists essentially of a unitary, reflowed photoresist.
20. The CMOS image sensor according to claim 13 , wherein each microlens-color filter structure consists of a unitary, reflowed photoresist.
21. The method according to claim 6 , wherein the convex microlens-color filter structures include no intervening layers or interfaces within the photoresist material.
22. The CMOS image sensor according to claim 1 , wherein the microlens-color filter structures include no intervening layers or interfaces within the convex photoresist material.
23. The CMOS image sensor according to claim 13 , wherein the microlens-color filter structures include no intervening layers or interfaces within the convex photoresist material.