A reference leak includes a leak layer formed of one of a metallic material, a glass material, and a ceramic material. The metallic material is selected from the group consisting of copper, nickel, and molybdenum. The leak layer comprises a number of substantially parallel leak through holes defined therein. The leak through holes may be cylindrical holes or polyhedrical holes. A length of each of the leak through holes is preferably not less than 20 times a diameter thereof. A diameter of each of the leak through holes is generally in the range from 10 nm to 500 nm. A length of each of the leak through holes is generally in the range from 100 nm to 100 μm. A leak rate of the reference leak is in the range from 10 −8 to 10 −15 tor×l/s. The leak through holes have substantially same length and diameter.
1. A reference leak having a custom-tailored leak rate for use in leak detection of a gas, the reference leak comprising:
a leak layer formed of one of a metallic material, a glass material, a composite material, and a ceramic material, the leak layer comprising one or more leak through holes defined therein, a diameter and a length of each of the leak through holes being calculated according to the following equations:
Q=n× ( P 1 −P 2 )× Y (1)
Y= 12.1×√{square root over (29/ M )}×√{square root over (T/293)}×( D 3 /L ) (2)
wherein,
Q represents a custom-tailored leak rate,
n represents a number of leak through holes,
P 1 represents a pressure of a gas intake side of the reference leak,
P 2 represents a pressure of a gas outlet side of the reference leak,
Y represents a conductance of the reference leak,
M represents a molecular weight of the gas to be detected using the reference leak,
T represents an operational temperature,
D represents one of a width and a diameter of the one or more leak through holes, and
L represents a length of the one or more leak through holes.
2. The reference leak as described in claim 1 , wherein a set of dimensions of each of the leak through holes satisfy the following requirement: L≧20 D.
3. The reference leak as described in claim 1 , wherein the leak layer is composed of a metallic material, the metallic material being selected from the group consisting of copper, nickel, and molybdenum, and alloys comprised substantially of at least one of such metals.
4. The reference leak as described in claim 1 , wherein the reference leak is configured such that a leak rate thereof is about in the range from 10 −8 to 10 −5 tor·l/s.
5. The reference leak as described in claim 1 , wherein the diameter of each of the leak through holes is in the approximate range from 10 nm to 500 nm.
6. The reference leak as described in claim 1 , wherein the length of each of the leak through holes is about in the range from 100 nm to 100 μm.