Electromagnetic wave shielding filter, method of manufacturing the same, PDP apparatus including the same filter
View Patent ↗An electromagnetic wave shielding filter that has low electric conductivity, high visible light transmittance and good durability, a method of manufacturing the electromagnetic wave shielding filter, and a PDP apparatus including the electromagnetic wave shielding filter. The electromagnetic wave shielding filter includes a laminate structure including multiple stacks each consisting of a niobium oxide layer, a first protective layer having a ZnO as a main component, and a metal layer sequentially laminated in that order, the multiple stacks formed by repeatedly laminating the respective layers at least three times, and a niobium oxide layer formed on the laminate structure.
1. An electromagnetic wave shielding filter comprising:
a laminate structure including multiple stacks, each stack consisting of a niobium oxide layer, a first protective layer having ZnO as a main component, and a metal layer sequentially laminated on a substrate in that order, where the multiple stacks are formed by repeatedly laminating the respective layers at least three times; and adjacent stacks are in direct contact with each other and wherein the niobium oxide layer of the one stack among the multiple stacks is in direct contact with the substrate; and
a niobium oxide layer formed on the laminate structure.
2. The electromagnetic wave shielding filter according to claim 1 , wherein the first protective layer is comprised of aluminum zinc oxide (AZO).
3. The electromagnetic wave shielding filter according to claim 1 , wherein the metal layer is comprised of silver or a silver alloy.
4. The electromagnetic wave shielding filter according to claim 1 , wherein the niobium oxide layer has a thickness in a range of 15 to 80 nm, the first protective layer has a thickness in a range of 1 to 10 nm and the metal layer has a thickness in a range of 7 to 20 nm.
5. The electromagnetic wave shielding filter according to claim 1 , wherein the niobium oxide layer on the substrate and the niobium oxide layer of the laminate structure have both a thickness in a range of 15 to 40 nm.
6. The electromagnetic wave shielding filter according to claim 1 , having a sheet resistance of 1.4Ω/Sq. or less.
7. The electromagnetic wave shielding filter according to claim 1 , having visible light transmittance of 65% or greater.
8. A plasma display panel (PDP) apparatus including the electromagnetic shielding filter according to claim 1 .
9. A method of manufacturing an electromagnetic wave shielding filter, comprising the steps of:
preparing a laminate structure including multiple stacks, each stack consisting of a niobium oxide layer, a first protective layer ZnO as a main component, and a metal layer sequentially laminated on a substrate in that order, where the multiple stacks are formed by repeatedly laminating the respective layers at least three times and adjacent stacks are in direct contact with each other, and wherein the niobium oxide layer of the one stack among the multiple stacks is in direct contact with the substrate; and
forming a niobium oxide layer on the laminate structure.