Semiconductor device including metal-insulator-metal capacitor arrangement
View Patent ↗A semiconductor device has a semiconductor substrate, a multi-layered wiring construction formed over the semiconductor device, and a metal-insulator-metal (MIM) capacitor arrangement established in the multi-layered wiring construction. The MIM capacitor arrangement includes first, second, third, fourth, fifth, and sixth electrode structures, which are arranged in order in parallel with each other at regular intervals. The first, second, fifth and sixth electrode structures are electrically connected to each other so as to define a first capacitor, and the third and fourth electrode structures are electrically connected to each other so as to define a second capacitor.
1. A semiconductor device comprising:
a semiconductor substrate;
a multi-layered wiring construction formed over said semiconductor substrate; and
a metal-insulator-metal capacitor arrangement established in said multi-layered wiring construction,
wherein said metal-insulator-metal capacitor arrangement includes first, second, third, fourth, fifth, sixth, seventh and eighth electrode structures, which are arranged in order in parallel with each other at regular intervals, said first, second, fifth and sixth electrode structures being electrically paired to each other so as to define a first capacitor, said third, fourth, seventh and eighth electrode structures being electrically paired to each other so as to define a second capacitor, and
wherein said first and fifth electrode structures are connected to each other with a first conductive line having a first node; said second and sixth electrode structures are connected to each other with a second conductive line having a second node; said third and seventh electrode structure is connected to a third conductive line having a third node; and said fourth and eighth electrode structure is connected to a fourth conductive line having a fourth node, voltages being independently applied to said first, second, third and fourth nodes.
2. The semiconductor device as set forth in claim 1 , wherein a high voltage and a low voltage are applied to said respective first and second nodes, and a low voltage and a high voltage are applied to said respective third and fourth nodes.
3. The semiconductor device as set forth in claim 1 , wherein a low voltage and a high voltage are applied to said respective first and second nodes, and a high voltage and a low voltage are applied to said respective third and fourth nodes.
4. A semiconductor device comprising:
a semiconductor substrate;
a multi-layered wiring construction formed over said semiconductor substrate; and
a metal-insulator-metal capacitor arrangement established in said multi-layered wiring construction,
wherein said metal-insulator-metal capacitor arrangement includes first, second, third and fourth pairs of electrode structures, which are arranged in order in parallel with each other at regular intervals in a plan view, said first and third pairs of electrode structures being electrically paired to each other in parallel so as to define a first capacitor, said second and fourth pair of electrode structures being electrically paired to each other in parallel so as to define a second capacitor, and
wherein the electrode structures included in said first pair are connected to respective first and second conductive lines having first and second nodes; the electrode structures included in said third pair are connected to the respective first and second conductive lines having the first and second nodes; and the electrode structures included in said second pair are connected to respective third and fourth conductive lines having third and fourth nodes; and the electrode structures included in said fourth pair are connected to respective third and fourth conductive lines having third and fourth nodes, voltages being independently applied to said first, second, third and fourth nodes.
5. The semiconductor device as set forth in claim 4 , wherein the electrode structure, included in said first pair, which is connected to said second conductive line, is adjacent to the electrode structure, included in said second pair, which is connected to said third conductive line; the electrode structure, included in said second pair, which is connected to said fourth conductive line, is adjacent to the electrode structure, included in said third pair, which is connected to said first conductive line; and the electrode structure, included in said third pair, which is connected to said second conductive line, is adjacent to the electrode structure, included in said fourth pair, which is connected to said third conductive line, a high voltage and a low voltage being applied to said respective first and second nodes, a low voltage and a high voltage being applied to said respective third and fourth nodes.
6. The semiconductor device as set forth in claim 4 , wherein the electrode structure, included in said first pair, which is connected to said second conductive line, is adjacent to the electrode structure, included in said second pair, which is connected to said third conductive line; the electrode structure, included in said second pair, which is connected to said fourth conductive line, is adjacent to the electrode structure, included in said third pair, which is connected to said first conductive line and the electrode structure, included in said third pair, which is connected to said second conductive line, is adjacent to the electrode structure, included in said fourth pair, which is connected to said third conductive line, a low voltage and a high voltage being applied to said respective first and second nodes, a high voltage and a low voltage being applied to said respective third and fourth nodes.