MOS transistor in an active region
View Patent ↗After an isolation region is formed using a field-forming silicon nitride film, this silicon nitride film is patterned, thereby a gate trench is formed. Next, a gate electrode material is buried into the gate trench, and this is etched back. Thereafter, the silicon nitride is removed, thereby a contact hole is formed. A contact plug is buried into this contact hole. With this arrangement, the contact plug can be formed without using a diffusion layer contact pattern. At the same time, the periphery of the contact plug substantially coincides with a boundary between the element isolation region and the active region. Accordingly, the active region can be reduced.
1. A semiconductor device, comprising:
an active region that is surrounded by an isolation region having a source/drain diffusion region and a channel region;
a gate electrode provided on the channel region; and
a contact plug connected to the source/drain diffusion region, wherein
a periphery of the contact plug at the isolation region side substantially coincides with a boundary between the isolation region and the active region.
2. The semiconductor device as claimed in claim 1 , further comprising a sidewall that covers a side surface of the gate electrode and a cap that covers an upper surface of the gate electrode, the sidewall and the cap being made of the same dielectric material as each other.
3. The semiconductor device as claimed in claim 2 , wherein said dielectric material is silicon oxide.
4. The semiconductor device as claimed in claim 2 , wherein an upper surface of the contact plug and an upper surface of the cap are coplanar.
5. The semiconductor device as claimed in claim 1 , wherein said isolation region has a structure that a dielectric material is buried in an isolation trench.
6. A semiconductor device comprising at least a memory cell region and a peripheral circuit region, wherein
each of the memory cell region and the peripheral circuit region includes:
an active region that is surrounded by an isolation region having a source/drain diffusion region and a channel region;
a gate electrode provided on the channel region; and
a contact plug connected to the source/drain diffusion region, wherein
a periphery of the contact plug at the isolation region side substantially coincides with a boundary between the isolation region and the active region.