Beam shaping prior to harmonic generation for increased stability of laser beam shaping post harmonic generation with integrated automatic displacement and thermal beam drift compensation

1. A laser beam delivery system comprising:

a laser generating a laser beam along a beam path;

at least one extra-cavity harmonic generation element located in the beam path for generating harmonic multiples of a beam input frequency; and

a radially non-symmetric extra-cavity beam forming element located before the at least one harmonic generation element for transforming an input energy profile of an input laser beam having a beam axis subject to lateral shift that is variable in radial direction and magnitude into an output laser beam having a desired output energy profile;

the radially non-symmetric beam forming element including:

an optical element including

a profile transformation function, including

 a first profile transformation function for transforming the input energy profile into the desired output energy profile, and

 a profile correction transformation function superimposed on the first profile transformation function for modifying the first profile transformation function to correct distortions in the output energy profile introduced be a lateral shift of the input laser beam.

2. The radially non-symmetric beam forming element of claim 1 , wherein the profile correction transformation function includes:

at least one of

a deficiency profile transformation function superimposed on the first profile transformation function of superimposing a compensating deficiency energy profile on the desired output energy profile in a location corresponding to a hotspot resulting from a lateral shift of the input laser beam, and

a hotspot profile transformation function superimposed on the first profile transformation function for superimposing a compensating hotspot energy profile on the desired output energy profile in a location corresponding to a deficiency resulting from a lateral shift of the output laser beam.

3. The radially non-symmetric beam forming element of claim 1 , wherein:

an optical axis of the beam forming element is

aligned parallel to the beam axis of the input laser beam by a distance proportionate to a maximum expected lateral shift of the beam axis of the input laser beam, so that

the input laser beam passes through the beam forming element parallel to and offset from the optical axis of the optical element.

4. The radially non-symmetric beam forming element of claim 3 , wherein:

the beam forming element is supported in a rotating mount allowing rotation of the profile transformation function about the optical axis of the optical element to allow adjustment of the profile transformation function to a current lateral shift of the input laser beam.

5. A method for providing an input laser beam having a desired energy profile to at least one extra-cavity harmonic generation element located in a beam path of a laser beam delivery system for generating harmonic multiples of a beam input frequency, comprising the steps of:

performing a profile transformation function on the input laser beam, including

performing a first profile transformation function in an extra-cavity radially non-symmetric beam forming element located before the at least one harmonic generation element to transform the input energy profile having a beam axis subject to lateral shift that is variable in radial direction and magnitude into the desired output energy profile, wherein

the radially non-symmetric beam forming element includes an optical element having a profile transformation function, including

a first profile transformation function for transforming the input energy profile into the desired output energy profile, and

performing a profile correction transformation function superimposed on the first profile transformation function to modify the first profile transformation function to correct distortions in the output energy profile introduced be a lateral shift of the input laser beam.

6. The method of claim 5 for transforming an input energy profile of an input laser beam subject to lateral shift that is variable in radial direction and magnitude into an output laser beam having a desired output energy profile, further comprising the steps of:

performing at least one of

a deficiency profile transformation function superimposed on the first profile transformation function to superimpose a compensating deficiency energy profile on the desired output energy profile in a location corresponding to a hotspot resulting form a lateral shift of the input laser beam, and

a hotspot profile transformation function superimposed on the first profile transformation function to superimpose a compensating hotspot energy profile on the desired output energy profile in a location corresponding to a deficiency resulting from a lateral shift of the input laser beam.

7. The method of claim 5 for transforming an input energy profile of an input laser beam subject to lateral shift that is variable in radial direction and magnitude into an output laser beam having a desired output energy profile, wherein:

the profile transformation function and profile correction transformation function are incorporated into a beam forming element, and

an optical axis of the beam forming element is

aligned parallel to the beam axis of the input laser beam and is

offset from an unshifted beam axis of the input laser beam by a distance proportionate to a maximum expected lateral shift of the beam axis of the input laser beam, so that

the input laser beam passes through the beam forming element parallel to and offset from the optical axis of the optical element.

8. The method of claim 7 for transforming an input energy profile of an input laser beam subject to lateral shift that is variable in radial direction and magnitude into an output laser beam having a desired output energy profile, wherein:

the beam forming element is supported in a rotating mount allowing rotation of the profile transformation function about the optical axis of the optical element, and

further including the steps of

adjusting of the profile transformation function to a current lateral shift of the input laser beam by rotation of the bam forming element.

9. A laser beam delivery system comprising:

a laser generating a laser beam along a beam path,

at least one extra-cavity harmonic generation element located along the beam path for generating harmonic multiples of a beam input frequency, and

an extra-cavity beam expansion element located before the at least one harmonic generation element;

wherein the beam expansion element is located before the at least one harmonic generation element expands and collimates the laser beam prior to the laser beam being multiplied by the at least one harmonic generation element.

10. The laser beam delivery system according to claim 9 , wherein the beam expansion element is a refractive lens.

11. The laser beam delivery system according to claim 9 , wherein the beam expansion element, located before the at least one harmonic generation element, is a beam expansion telescope.

12. The laser beam delivery system according to claim 9 , wherein the at least one harmonic generation element includes a second harmonic generation crystal and a third harmonic generation crystal;

the beam expansion element is located before the second and third harmonic generating crystals; and

a non-symmetric beamforming element is located following the second and third harmonic generating crystals.

13. The laser beam delivery system according to claim 9 , wherein the at least one harmonic generation element includes a second harmonic generation crystal and a third harmonic generation crystal; and

the beam expansion element and a non-symmetric beamforming element are located between the second and third harmonic generating crystals.