Forming a phase change memory with an ovonic threshold switch
View Patent ↗A phase change memory may include an ovonic threshold switch formed over an ovonic memory. In one embodiment, the switch includes a chalcogenide layer that overlaps an underlying electrode. Then, edge damage, due to etching the chalcogenide layer, may be isolated to reduce leakage current.
1. An apparatus comprising:
an ovonic threshold switch;
an ovonic memory under said ovonic threshold switch; and
said ovonic threshold switch including a lower electrode, a chalcogenide layer, an upper electrode, and an intervening dielectric, a conductor formed in said dielectric, said chalcogenide layer overhanging said conductor on two opposed sides.
2. The apparatus of claim 1 wherein said conductor is a plug.
3. The apparatus of claim 2 wherein said plug is formed in the dielectric including an insulator on either side of said plug, said insulator on either side of said plug underlying said overlying chalcogenide layer.
4. The apparatus of claim 3 wherein said ovonic threshold switch lower electrode, chalcogenide layer, and upper electrode are all formed with a common edge.
5. The apparatus of claim 4 including a common electrode between said switch and said memory.
6. The apparatus of claim 5 wherein said common electrode has a common edge with one or more layers of said ovonic threshold switch.
7. The apparatus of claim 6 wherein said memory includes a pore and a chalcogenide layer, said chalcogenide layer formed in said pore.
8. The apparatus of claim 6 wherein said memory includes an insulator with a pore formed in said insulator, said pore filled with a plug.
9. The apparatus of claim 8 including a common electrode over said pore and said insulator, said common electrode having dimensions corresponding to the dimensions of said ovonic threshold switch chalcogenide layer.
10. The apparatus of claim 1 wherein said ovonic threshold switch is formed as an etched stack having a common edge and said memory includes a lance, the overlap of said stack to said lance being greater than one-half the thickness of the chalcogenide layer of said ovonic threshold switch.
11. A system comprising:
a battery;
a processor; and
a memory coupled to said processor, said memory including a cell including an ovonic threshold switch and an ovonic memory under said ovonic threshold switch, said switch including a lower electrode, a chalcogenide layer, an upper electrode, and an intervening dielectric, a conductor formed in said dielectric, said chalcogenide layer overhanging said conductor on two opposed sides.
12. The system of claim 11 wherein said conductor is formed in the dielectric including an insulator on either side of said conductor, said insulator on either side of said conductor underlying said overlying chalcogenide layer.
13. The system of claim 12 wherein said switch lower electrode, chalcogenide layer, and upper electrode are all formed with a common edge.
14. The system of claim 13 including a common electrode between said switch and said ovonic memory.
15. The system of claim 14 wherein said common electrode has a common edge with one or more layers of said ovonic threshold switch.