Anti-reflective coatings
View Patent ↗Novel self-crosslinking polymers are provided and which are useful in antireflective coatings to reduce outgassing.
1. A polymer consisting of the reaction product between poly(hydroxyethyl methacrylate-co-benzyl methacrylate) and N,N,N,N-tetra(methoxymethyl)glycoluril, wherein the polymer is capable of self-crosslinking under acidic conditions.
2. An anti-reflective coating composition comprising (i) a polymer selected from the group consisting of the reaction product between poly(allyl alcohol-co-styrene) and N,N,N,N-tetra(methoxymethyl)glycoluril and the reaction product between poly(hydroxyethyl methacrylate-co-benzyl methacrylate) and N,N,N,N-tetra(methoxymethyl)glycoluril, wherein the polymer is capable of self-crosslinking under acidic conditions, (ii) a solvent; and a thermal acid generator.
3. The composition of claim 2 wherein for (i), the polymer is the reaction product between poly(allyl alcohol-co-styrene) and N,N,N,N-tetra(methoxymethyl)glycoluril.
4. The composition of claim 2 wherein for (i), the polymer is the reaction product between poly(hydroxyethyl methacrylate-co-benzyl methacrylate) and N,N,N,N-tetra(methoxymethyl)glycoluril.