Angular velocity sensor
View Patent ↗An angular velocity sensor is provided with an oscillator including a pair of drive arms, a base portion coupled to one end of each drive arm, and a flexible arm extending from the base portion in a direction opposite from the drive arms. This angular velocity sensor is also provided with a driving member which oscillates the pair of drive arms in an approaching or separating direction, and a distortion detecting member which detects a distortion of the flexible arm in the oscillating direction of the drive arms.
1. An angular velocity sensor, comprising:
an oscillator including a pair of drive arms extending in parallel with each other, a base portion coupled to one end of each drive arm, and a flexible arm whose center line passes between the pair of drive arms,
a driving member which oscillates the pair of drive arms in an approaching or separating direction, and
a distortion detecting member which detects a distortion of the flexible arm in the oscillating direction of the drive arms.
2. An angular velocity sensor according to claim 1 , wherein the flexible arm extends from the base portion in a direction opposite from the drive arms.
3. An angular velocity sensor according to claim 1 , wherein the oscillator includes a rectangular frame, the pair of drive arms are coupled to an outer side of one side of the frame while leaving corner portions of the frame, and the flexible arm is coupled to an inner side of the one side which serves as the base portion.
4. An angular velocity sensor according to claim 3 , further comprising a supporting element for supporting the oscillator, wherein one side of the frame opposed to the base portion is fixed to the supporting element.
5. An angular velocity sensor according to claim 4 , wherein oscillation absorbing portions for absorbing the oscillation of the oscillator are formed in the remaining two sides of the frame.
6. An angular velocity sensor according to claim 5 , wherein the oscillation absorbing portions are grooves or slits formed in the remaining two sides.
7. An angular velocity sensor according to claim 3 , wherein distances from the corner portions of the frame to the corresponding drive arms are set to be substantially half a distance between the pair of drive arms.
8. An angular velocity sensor according to claim 1 , wherein a distance between the pair of drive arms is set to be substantially equal to a width of the flexible arm.
9. An angular velocity sensor according to claim 1 , wherein a plummet is provided at a leading end of the flexible arm.