Notched compound semiconductor wafer
View Patent ↗There is provided a notched compound semiconductor crystal having the same specification even if it is turned over. With respect to a compound semiconductor wafer produced by slicing a compound semiconductor crystal having a crystal plane of (100) plane, the crystal is sliced so as to be tilted from the (100) plane in a direction of [101] or [10-1] when a notch is formed in a direction of [010], or the crystal is sliced so as to be tilted from the (100) plane in a direction of [0-10] or [010] when a notch is formed in a direction of [001], or the crystal is sliced so as to be tilted from the (100) plane in a direction of [001] or [00-1] when a notch is formed in a direction of [0-10] , or the crystal is sliced so as to be tilted from the (100) plane in a direction of [010] or [0-10] when a notch is formed in a direction of [00-1].
1. A notched compound semiconductor wafer which has a plane orientation tilted from a (100) plane in a [001] or [00-1] direction and which has a notch in a [0-10] direction.
2. A notched compound semiconductor wafer as set forth in claim 1 , wherein an angle of the plane orientation to be tilted from the (100) plane is in the range of from ±0.5° to 15°.
3. A notched compound semiconductor wafer as set forth in claim 1 , wherein an inplane rotation error in a direction of the plane orientation to be tilted is within ±10°.
4. A notched compound semiconductor wafer as set forth in claim 1 , which is made of a compound semiconductor having a zincblende crystal structure.
5. A notched compound semiconductor wafer as set forth in claim 1 , which is a circular compound semiconductor wafer having a diameter of at least 99.0 mm.