Phase change memory with threshold switch select device
View Patent ↗An ovonic threshold switch may be formed of a continuous chalcogenide layer. That layer spans multiple cells, forming a phase change memory. In other words, the ovonic threshold switch may be formed of a chalcogenide layer which extends, uninterrupted, over numerous cells of a phase change memory.
1. A method comprising:
using a continuous layer of chalcogenide to act as a portion of ovonic threshold switches for all cells of a finished, functioning phase change memory; and
forming a chalcogenide material in contact with said continuous layer of chalcogenide.
2. The method of claim 1 including forming an ovonic threshold switch over an ovonic unified memory.
3. The method of claim 1 including forming an electrical contact on one side of said continuous layer of chalcogenide and said chalcogenide material on the opposite side of said continuous layer of chalcogenide.
4. The method of claim 3 including forming said chalcogenide material in a pore in an insulator.
5. The method of claim 4 including forming a sidewall spacer in said pore.
6. The method of claim 4 including forming a heater in said pore under said chalcogenide material.
7. The method of claim 1 including forming a continuous layer of chalcogenide that does not change phase.
8. The method of claim 1 including forming an upper electrode over said continuous layer of chalcogenide.
9. The method of claim 1 including forming said continuous layer of chalcogenide and said chalcogenide material of different materials.
10. A method comprising:
forming a plurality of finished, functioning ovonic threshold switches without etching a chalcogenide layer that is part of said switches; and
forming a chalcogenide layer and a plurality of finished, functioning memory elements and extending said chalcogenide layer across said memory elements.
11. The method of claim 10 including forming a chalcogenide layer that does not change phase.
12. The method of claim 11 including forming a memory element with a chalcogenide material in contact with a chaclogenide layer.
13. The method of claim 12 including forming said chalcogenide material and said chalcogenide layer of different materials.
14. A method comprising:
forming a chalcogenide layer and a plurality of finished, functioning memory elements;
extending said chalcogenide layer across said memory elements; and
forming a finished, functioning ovonic threshold switch without etching the chalcogenide layer.
15. The method of claim 14 including forming a chalcogenide layer that does not change phase.
16. The method of claim 14 including forming a memory element with a chalcogenide material in contact with a chalcogenide layer.
17. The method of claim 16 including forming said chalcogenide material and said chalcogenide layer of different materials.